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1、Specification of one set computer automation ion plating machine model AS600DMTGAS600DMTG型计算机全自动离子镀膜机技术规格April 2003Vacuum chamber 真空室F 800 x 1000 mm2Effective Coating Space有效镀膜空间F 600 x 600 mm2Ultimate Pressure极限真空度 3.0 x 10-4 PaPump Down Time (from atmosphere to 4.0 x 10-3 Pa empty chamber at room
2、temperature)抽气时间（室温空真空室条件下由大气抽至4.0 x 10-3 Pa） 10 minCoating Cycle (Tool) 镀膜时间（工具镀） 180 minTotal Electric Power 总电功率 (380-400V, 50-60 Hz) 80 kVACooling Water Circulation 冷却水循环3.0吨/小时, 2.0kg/cm2, 205C3.0吨/小时, 2.0kg/cm2, 5和30COccupation Space 占据空间5 x 6 x 3.5 m3Application 应用Various cutting, punching an
3、d molding tools and high quality decorative purposes各种切削、冲模具和高质量的装饰涂层1- Main body 主体1 SET1)- Vacuum Chamber with enhanced water cooling jacket 带增强水冷壳的真空室1 set2)- Front door with curved surface to enhance its rigidity and 2 view ports and extra 2 MS source flanges 带二个观察窗和另外2个磁控靶法兰孔的拱形（增强刚性）前开门1 set3)
4、- Workpiece turntable on chamber roof 顶装工件转架1 set10 hooks with revolution and rotation for small and medium size workpiece with space of 130 in diameter 10个带自公转挂钩用于装挂中小尺寸工件，回转直径为130。4)- One view port and one infra-red temperature detector view port under the large evacuation tube 一个观察窗和一个红外测温窗置于大抽气口
5、下方1 set5)- Multi-layer chamber lining (shield) 多层真空室热屏蔽板1 set6)- Side door for large rectangular MS source twin 大长方形磁控孪生靶专用侧开门2 pcs7)- Evaporation source flange in a column with an ear case 一列蒸发源法兰带耳柜3 pcs8)- Bottom flange for large rectangular ion source 大长方形离子源用底法兰2 pcs9)- Bottom flange for centra
6、l electric heater set and heating tubes by the chamber wall 中心加热器用底法兰和旁边加热管用法兰1 set10)- Flange on vacuum tube for liquid N2 cooling trap 在真空管道上的液氮冷阱用法兰1 pc11)- Chamber chassis 真空室底架1 set2- Vacuum evacuation system 真空获得系统1 SET1)- Turbo molecular pump 3500/400 涡轮分子泵（3500/400）1 set2)- Leybold rotary va
7、ne mechanical pump for backing TRIVAC D16B 用于前级的莱宝直连旋片式机械真空泵1 set3)- Leybold single stage rotary vane mechanical pump SOGEVACSV200 单级旋片式莱宝机械真空泵1 set4)- Roots pump 罗茨真空机械泵 ZJY-150A 采用同步启动技术（丹普专利）1 set5)- High vacuum valve GDQ-J400 高真空阀1 set6)- A stepping motor driven throttle valve 400步进电机驱动节流阀(丹普专有)
8、1 set7)- A cold trap 400 with high ventilation 高通导扩散泵冷阱1 set8)- Vacuum valves and vacuum tubes真空阀和真空管道1 set9)- Pneumatic driving system 气压传动系统1 set3- Complex vacuum meter SKY90 one ionization gauge ZJ-27 and two thermocouple (Pirani) gauges ZJ-54D 复合式真空计SKY90（一个电离真空规ZJ-27、两个热电偶真空规ZJ-54D）1 SET4- Gas
9、mass flow control system (4 channels)四路气体质量流量控制系统1 SET5- Unbalanced magnetron sputtering source with target surface (RMO717/115)长方形非平衡磁控溅射离子源，靶表面为(RMO717/115)4 SETS6- MS SCR DC current constant power supply（25kVA）直流可控硅恒流磁控溅射电源 (up to30A, 700v)4 SETS7- Cathodic arc ion evaporator (RCAE1047) with auto
10、 pneumatic driving ignition system, manual ignition button and on-line monitor function七号电弧离子蒸发源（靶直径100mm）带有气动自动引弧系统，手动引弧按钮和实时在线监测功能（丹普专有）3 SETS8- Cathodic arc ion evaporator inverter power supply (arc discharge from 40 to 150A, arc current can be set and adjusted by PLC) 阴极弧逆变电源（稳定电弧放电从40到150A，弧电流可
11、由计算机自动设定和调整）3 SETS9- SCR DC power supply for bias (30 kVA, up to 1000 V, 28 A) 直流可控硅轰偏电源 (30kVA, 高达-1000伏, 28安)1 SET10- Newly developed large rectangular gas ion source standing on bottom flange (LISE830/102 without filament and no maintenance) 安装在底法兰上的大长方形气体离子源(LISE830/102不带灯丝、免维护) (丹普专有)2 SETS11-
12、AE DC inverter power supply for gas ion source (6 kW, output current up to 10 A) 进口AE气体离子源直流逆变电源（6 kW，输出电流可达16安）2 SETS12- Workpiece electric heating system 工件电加热系统（保证真空室达到450度，并长期使用可靠） One electric heating tube set with the normal designing (30 kW) 一套常规电加热管 (30 kW) 1 SET13- Service cabinet for evacu
13、ation system and cooling water distribution用于真空获得系统控制接线和冷却水分配的分立服务柜（实时在线监测所有冷却水路的水流量和水温，确保各种离子源等关键器件的正常工作）(丹普专有)1 SET14- Central control cabinet with PLC 带一套PLC的电器控制柜 (丹普专有)1 SET15- Power outputl control cabinet 功率输出控制柜 (丹普专有)1 SET16- Industrial control computer in a IPC cabinet工业控制计算机柜1 SET17- Colo
14、r ink jet printer in a IPC cabinet彩色喷墨打印机置于工控机柜1 SET18- Computing code in PLC for machine control and monitoring 为机器监控专门开发的PLC计算控制软件 (丹普专有)1 SET19- Computing code in IPC for operator-machine interface 为人机界面专门开发的工业控制计算机软件 (丹普专有)1 SET20- Liquid nitrogen cold trap and its tank in option 液氮冷阱和液氮瓶（任选）0 set21- Vacuum leak detector in option真空检漏仪（任选）0 set22- Infra-red temperature detector in option红外测温仪（任选）0 set