《BS-ISO-18114-2003.pdf》由会员分享，可在线阅读，更多相关《BS-ISO-18114-2003.pdf（14页珍藏版）》请在三一文库上搜索。
1、BRITISH STANDARD BS ISO 18114:2003 Surface chemical analysis Secondary-ion mass spectrometry Determination of relative sensitivity factors from ion-implanted reference materials ICS 71.040.40 ? Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:26:12 GMT+00:00 2006, Uncontrolled Copy, (c) BSI
2、 BS ISO 18114:2003 This British Standard was published under the authority of the Standards Policy and Strategy Committee on 7 August 2003 BSI 7 August 2003 ISBN 0 580 42438 3 National foreword This British Standard reproduces verbatim ISO 18114:2003 and implements it as the UK national standard. Th
3、e UK participation in its preparation was entrusted to Technical Committee CII/60, Surface chemical analysis, which has the responsibility to: A list of organizations represented on this committee can be obtained on request to its secretary. Cross-references The British Standards which implement int
4、ernational publications referred to in this document may be found in the BSI Catalogue under the section entitled “International Standards Correspondence Index”, or by using the “Search” facility of the BSI Electronic Catalogue or of British Standards Online. This publication does not purport to inc
5、lude all the necessary provisions of a contract. Users are responsible for its correct application. Compliance with a British Standard does not of itself confer immunity from legal obligations. aid enquirers to understand the text; present to the responsible international/European committee any enqu
6、iries on the interpretation, or proposals for change, and keep the UK interests informed; monitor related international and European developments and promulgate them in the UK. Summary of pages This document comprises a front cover, an inside front cover, the ISO title page, pages ii to v, a blank p
7、age, pages 1 to 4, an inside back cover and a back cover. The BSI copyright notice displayed in this document indicates when the document was last issued. Amendments issued since publication Amd. No. DateComments Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:26:12 GMT+00:00 2006, Uncontr
8、olled Copy, (c) BSI Reference number ISO 18114:2003(E) OSI 3002 INTERNATIONAL STANDARD ISO 18114 First edition 2003-04-01 Surface chemical analysis Secondary-ion mass spectrometry Determination of relative sensitivity factors from ion-implanted reference materials Analyse chimique des surfaces Spect
9、romtrie de masse des ions secondaires Dtermination des facteurs de sensibilit relative laide de matriaux de rfrence ions implants BS ISO 18114:2003 Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:26:12 GMT+00:00 2006, Uncontrolled Copy, (c) BSI IS:41181 O3002(E) DPlcsid Fremia ihTs PDF fil
10、e mya ctnoian emdebt dedyfepcaes. In ccacnadrow eitA hebods licnesilop gnic,y tihs file mirp eb yatnde iv roweb detu slahl ton ide ebtlnu deess teh typfecaes wihce era hml era deddebicsnede ti dna onstlalde t noeh comuptfrep reromign tide ehtin.g In wodlnidaot gnihs fil,e trapise atpecc tiereht nser
11、 ehnopsiiblity fo nto ifnriigngn Aebods licnesilop gnic.y ehT ISO tneClar Secrteirata caceptl on siibality in this .aera Ai ebods a tedarmfo kra Aebod SystemI snctaropro.de teDials fo teh sfotwcudorp erats sut deo crtaee tihs PDF file cna f ebi dnuon tlareneG eh Ifnler oatit evt oeh file; tP ehDc-Fr
12、taeino marapteres wtpo ereimizf deirp rotni.gn Evc yresah era t neebakt nesne ot erutah teh fili es siutlbaf eosu rI yb eSO memdob rebeis. In tlnu ehikletneve y ttah lborp aem lertait gno it is f,dnuo plsaee ifnrom ttneC ehlar Secterirata ta teh serddaig sleb nevwo. ISO 3002 Athgir lls serevr.de sel
13、nUs towrehise specfidei, trap on fo thsi ilbupctanoi may cudorper ebtu ro dezilina ni dey fomr yb ro nam y,snae lecetrinoc m roceinahcla, icnliduntohp gcoiypom dna gnicrfoilm, wittuoh mrepissii non writif gnrmo ietI rehSta O tserdda ehs ebolw or ISOs memreb i ydobn the cnuotfo yr ttseuqer ehe.r ISO
14、cirypothg fofice saCe tsopale 65 eneG 1121-HC 02 av leT. 4 + 10 947 22 1 11 xaF0 947 22 14 + 9 74 E-mial coirypthgis.o gro We bwww.is.o gro ii ISO 3002 Allr ihgtsser edevr BS ISO 18114:2003 Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:26:12 GMT+00:00 2006, Uncontrolled Copy, (c) BSI IS:
15、41181 O3002(E) I SO 3002 All irhgts seredevr iii Contents Page Forewordiv Introduction.v 1 Scope1 2 Normative references1 3 Terms and definitions.1 4 Symbols and abbreviated terms1 5 Principle .2 6 Apparatus.2 7 Ion-implanted reference materials.2 8 Procedure.2 9 Test report3 Bibliography4 BS ISO 18
16、114:2003 Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:26:12 GMT+00:00 2006, Uncontrolled Copy, (c) BSI IS:41181 O3002(E) iv I SO 3002 All irhgts seredevr Foreword ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member
17、bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental
18、and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. International Standards are drafted in accordance with the rules given in the ISO/IEC Directive
19、s, Part 2. The main task of technical committees is to prepare International Standards. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies c
20、asting a vote. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. ISO 18114 was prepared by Technical Committee ISO/TC 201, Surface chemical analysis, S
21、ubcommittee SC 6, Secondary ion mass spectrometry. BS ISO 18114:2003 Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:26:12 GMT+00:00 2006, Uncontrolled Copy, (c) BSI IS:41181 O3002(E) I SO 3002 All irhgts seredevr v Introduction Ion-implanted materials are commonly used in secondary-ion ma
22、ss spectrometry for the calibration of instruments. This international Standard was prepared to provide a uniform method for determining the relative sensitivity factor of an element in a specified matrix from an ion-implanted reference material, and to show how the concentration of the element in a
23、 different sample of the same matrix material can be determined. BS ISO 18114:2003 Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:26:12 GMT+00:00 2006, Uncontrolled Copy, (c) BSI blank BS ISO 18114:2003 Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:26:12 GMT+00:00 2006, Uncont
24、rolled Copy, (c) BSI INTENRATIONAL TSANDADR IS:41181 O3002(E) I SO 3002 All irhgts seredevr 1 Surface chemical analysis Secondary-ion mass spectrometry Determination of relative sensitivity factors from ion-implanted reference materials 1 Scope This International Standard specifies a method of deter
25、mining relative sensitivity factors (RSFs) for secondary- ion mass spectrometry (SIMS) from ion-implanted reference materials. The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed on
26、e atomic percent. 2 Normative references The following referenced documents are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies. ISO 1811
27、5, Surface chemical analysis Vocabulary 3 Terms and definitions For the purposes of this document, the terms and definitions given in ISO 18115 apply. 4 Symbols and abbreviated terms ,A M i C the atomic concentration of the analyte element A in the matrix M at cycle i of a depth profile, expressed i
28、n atoms per unit volume d the depth over which the depth profile is integrated, expressed in length units j A i I the detected count rates of the analyte ion of isotope Aj at measurement cycle i, expressed in counts/s k M i I the detected count rates of the reference isotope Mk at measurement cycle
29、i, expressed in counts/s IBG the mean background count rate of species Aj, expressed in counts/s N Aj the fractional isotopic abundance of the analyte isotope Aj in the unknown sample n the number of cycles over which the depth profile is integrated the implanted fluence of isotope Aj, expressed in
30、atoms per unit area RSF the relative sensitivity factor, expressed in atoms per unit volume SIMS secondary-ion mass spectrometry BS ISO 18114:2003 Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:26:12 GMT+00:00 2006, Uncontrolled Copy, (c) BSI IS:41181 O3002(E) 2 I SO 3002 All irhgts sered
31、evr 5 Principle An isotopic relative sensitivity factor (RSF) for a particular element-matrix combination is derived from a SIMS depth profile of an ion-implanted external standard. This RSF can then be used to quantify the concentration of the same element as a function of depth in a different samp
32、le of the same matrix material, using the equation: , , RSF jjk j k AAM A Mi i A M i I C IN = (1) This procedure only applies to samples and reference materials in which the detected count rate of the analyte ion is directly proportional to its concentration. In practice, the upper limit of analyte
33、concentration for which this proportionality holds is generally assumed to be one atomic percent. The measurement conditions used for the analysis of reference materials and unknown samples shall be the same. 6 Apparatus The procedure described here can be used to determine an RSF from data obtained
34、 with any SIMS instrument that is capable of obtaining depth profiles. Follow the instrument manufacturers instructions or local documented procedures for setting up the instrument to obtain the best quality depth profile data. 7 Ion-implanted reference materials Ion-implanted reference materials fo
35、r this procedure shall have peak concentrations below one atomic percent, but at least a factor of 100 greater than the background intensity or detection limit of the analyte element in the SIMS instrument. The depth of the peak in the depth distribution of the analyte shall be at least a factor of
36、two below the depth of the onset of steady-state sputtering conditions as indicated by the stability of a matrix reference signal. Use certified reference materials (CRMs) or secondary materials derived from CRMs, when available. If no CRM is available, use reference materials for which the implante
37、d fluence has been measured by an independent method such as Rutherford backscattering spectrometry or neutron activation analysis, if possible. 8 Procedure Determine the count rates of the ions of analyte isotope Aj, j A i I, and reference isotope Mk, k M i I, at each measurement cycle i of the dep
38、th profile of the implanted reference material. Calculate the relative sensitivity factor for isotopic species Aj of element A in matrix M with isotopic reference species Mk from the equation: , BG 1 RSF jk j k AM A n i M ii n II d I = = (2) The depth d is typically calculated by measuring the depth
39、 of the sputtered crater in the sample with a calibrated stylus profilometer and assuming that a constant depth is removed over each measurement cycle. BS ISO 18114:2003 Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:26:12 GMT+00:00 2006, Uncontrolled Copy, (c) BSI IS:41181 O3002(E) I SO
40、3002 All irhgts seredevr 3 If the variation of the reference species count rate is smaller than a specified tolerance level, it may be regarded as constant and its value k M I need be measured only once during the depth profile. In this case, the equation used to calculate the RSF becomes: , BG 1 RS
41、F k jk j M AM n A i i nI IId = = (3) 9 Test report The following information shall be recorded when a relative sensitivity factor is determined by this method: a) the relative sensitivity factor; b) the model of SIMS instrument used; c) the primary-beam species and energy; d) the secondary-ion speci
42、es and polarity; e) the reference ion isotope and species; f) any special spectrometer conditions (e.g. high mass resolution, kinetic energy filtering); g) any special analytical conditions (e.g. oxygen flooding of surface). BS ISO 18114:2003 Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04
43、:26:12 GMT+00:00 2006, Uncontrolled Copy, (c) BSI IS:41181 O3002(E) 4 I SO 3002 All irhgts seredevr Bibliography 1 WILSON, R.G., STEVIE, F.A., and MAGEE, C.W., Secondary Ion Mass Spectrometry A Practical Handbook for Depth Profiling and Bulk Impurity Analysis, John Wiley and Sons, New York, 1989, Se
44、ction 3.1. BS ISO 18114:2003 Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:26:12 GMT+00:00 2006, Uncontrolled Copy, (c) BSI blank BS ISO 18114:2003 Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:26:12 GMT+00:00 2006, Uncontrolled Copy, (c) BSI BS ISO 18114:2003 BSI 389 Chiswic
45、k High Road London W4 4AL BSI British Standards Institution BSI is the independent national body responsible for preparing British Standards. It presents the UK view on standards in Europe and at the international level. It is incorporated by Royal Charter. Revisions British Standards are updated by
46、 amendment or revision. Users of British Standards should make sure that they possess the latest amendments or editions. It is the constant aim of BSI to improve the quality of our products and services. We would be grateful if anyone finding an inaccuracy or ambiguity while using this British Stand
47、ard would inform the Secretary of the technical committee responsible, the identity of which can be found on the inside front cover. Tel: +44 (0)20 8996 9000. Fax: +44 (0)20 8996 7400. BSI offers members an individual updating service called PLUS which ensures that subscribers automatically receive
48、the latest editions of standards. Buying standards Orders for all BSI, international and foreign standards publications should be addressed to Customer Services. Tel: +44 (0)20 8996 9001. Fax: +44 (0)20 8996 7001. Email: ordersbsi-. Standards are also available from the BSI website at http:/www.bsi-
49、. In response to orders for international standards, it is BSI policy to supply the BSI implementation of those that have been published as British Standards, unless otherwise requested. Information on standards BSI provides a wide range of information on national, European and international standards through its Library and its Technical Help to Exp