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1、 Reference number ISO 14880-3:2006(E) ISO 2006 INTERNATIONAL STANDARD ISO 14880-3 First edition 2006-06-01 Optics and photonics Microlens arrays Part 3: Test methods for optical properties other than wavefront aberrations Optique et photonique Rseaux de microlentilles Partie 3: Mthode dessai pour le
2、s proprits optiques autres que les aberrations du front donde Copyright International Organization for Standardization Provided by IHS under license with ISO Licensee=NASA Technical Standards 1/9972545001 Not for Resale, 04/19/2007 01:56:17 MDTNo reproduction or networking permitted without license
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6、 at the address given below. ISO 2006 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from either ISO at the address b
7、elow or ISOs member body in the country of the requester. ISO copyright office Case postale 56 CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 41 22 749 09 47 E-mail copyrightiso.org Web www.iso.org Published in Switzerland ii ISO 2006 All rights reserved Copyright International Organization for Stan
8、dardization Provided by IHS under license with ISO Licensee=NASA Technical Standards 1/9972545001 Not for Resale, 04/19/2007 01:56:17 MDTNo reproduction or networking permitted without license from IHS -,-,- ISO 14880-3:2006(E) ISO 2006 All rights reserved iii Contents Page Foreword iv Introduction
9、v 1 Scope . 1 2 Normative references. 1 3 Terms and definitions. 1 4 Substrate test 1 5 Microscope test method 1 5.1 Principle. 1 5.2 Measurement arrangement and test equipment 2 5.3 Preparation 4 6 Procedure 4 6.1 General. 4 6.2 Measurement of effective back or front focal length 4 6.3 Measurement
10、of chromatic aberration . 4 6.4 Measurement of the uniformity of the focal spot positions. 5 7 Results and uncertainties 5 8 Coupling efficiency, imaging quality 6 9 Test report . 6 Annex A (informative) Measurements with wavefront measuring systems. 8 Annex B (normative) Confocal measurement of eff
11、ective back or front focal length of lens array 10 Annex C (informative) Coupling efficiency, imaging quality . 12 Annex D (normative) Measurement of the uniformity of the focal spot positions of a microlens array . 13 Bibliography. 14 Copyright International Organization for Standardization Provide
12、d by IHS under license with ISO Licensee=NASA Technical Standards 1/9972545001 Not for Resale, 04/19/2007 01:56:17 MDTNo reproduction or networking permitted without license from IHS -,-,- ISO 14880-3:2006(E) iv ISO 2006 All rights reserved Foreword ISO (the International Organization for Standardiz
13、ation) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be
14、 represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. International Standar
15、ds are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2. The main task of technical committees is to prepare International Standards. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an Intern
16、ational Standard requires approval by at least 75 % of the member bodies casting a vote. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. ISO 14880-3
17、was prepared by Technical Committee ISO/TC 172, Optics and photonics, Subcommittee SC 9, Electro-optical systems. ISO 14880 consists of the following parts, under the general title Optics and photonics Microlens arrays: Part 1: Vocabulary Part 2: Test methods for wavefront aberrations Part 3: Test m
18、ethods for optical properties other than wavefront aberrations Part 4: Test methods for geometrical properties Copyright International Organization for Standardization Provided by IHS under license with ISO Licensee=NASA Technical Standards 1/9972545001 Not for Resale, 04/19/2007 01:56:17 MDTNo repr
19、oduction or networking permitted without license from IHS -,-,- ISO 14880-3:2006(E) ISO 2006 All rights reserved v Introduction This part of 14880 specifies methods of testing optical properties, other than wavefront aberrations, of microlens arrays. Examples of applications for microlens arrays inc
20、lude three-dimensional displays, coupling optics associated with arrayed light sources and photo-detectors, enhanced optics for liquid crystal displays, and optical parallel processor elements. The testing of microlenses is in principle similar to testing any other lens. The same parameters need to
21、be measured and the same techniques used. However, in many cases the measurement of very small lenses presents practical problems which make it difficult to use the standard equipment that is available for testing normal size lenses. The market in microlens arrays has generated a need for agreement
22、on basic terminology and test methods. Standard terminology and clear definitions are needed not only to promote applications but also to encourage scientists and engineers to exchange ideas and new concepts based on common understanding. This part of 14880 contributes to the purpose of the series o
23、f ISO 14880 standards which is to improve the compatibility and interchangeability of lens arrays from different suppliers and to enhance development of the technology using microlens arrays. The measurement of focal length is described in the body of this part of ISO 14880 and the use of an alterna
24、tive technique, interferometry, is described in Annex A. Measurement of the focal length of an array of microlenses, using a confocal technique, is described in Annex B. Coupling efficiency and imaging quality are discussed in Annex C. Measurement of the focal spot positions of an array of microlens
25、es in parallel, using the Shack-Hartmann technique, is described in Annex D. Copyright International Organization for Standardization Provided by IHS under license with ISO Licensee=NASA Technical Standards 1/9972545001 Not for Resale, 04/19/2007 01:56:17 MDTNo reproduction or networking permitted w
26、ithout license from IHS -,-,- Copyright International Organization for Standardization Provided by IHS under license with ISO Licensee=NASA Technical Standards 1/9972545001 Not for Resale, 04/19/2007 01:56:17 MDTNo reproduction or networking permitted without license from IHS -,-,- INTERNATIONAL STA
27、NDARD ISO 14880-3:2006(E) ISO 2006 All rights reserved 1 Optics and photonics Microlens arrays Part 3: Test methods for optical properties other than wavefront aberrations 1 Scope This part of ISO 14880 specifies methods for testing optical properties, other than wavefront aberrations, of microlense
28、s in microlens arrays. It is applicable to microlens arrays with very small lenses formed on one or more surfaces of a common substrate and to graded index microlenses. 2 Normative references The following referenced documents are indispensable for the application of this document. For dated referen
29、ces, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies. ISO 14880-1, Optics and photonics Microlens arrays Part 1: Vocabulary ISO 10110-5, Optics and optical instruments Preparation of drawings for optical element
30、s and systems Part 5: Surface form tolerances 3 Terms and definitions For the purposes of this document, the terms and definitions given in ISO 14880-1 apply. 4 Substrate test The optical quality of the substrate contributes to the quality of the focal positions defined by the microlenses and shall
31、be quantified in accordance with ISO 10110-5. 5 Microscope test method 5.1 Principle The basic principle is to locate, by optical means, the surface of the microlens under test. The effective back (front) focal length is determined by measuring the axial displacement necessary to locate the focal po
32、sition. Copyright International Organization for Standardization Provided by IHS under license with ISO Licensee=NASA Technical Standards 1/9972545001 Not for Resale, 04/19/2007 01:56:17 MDTNo reproduction or networking permitted without license from IHS -,-,- ISO 14880-3:2006(E) 2 ISO 2006 All righ
33、ts reserved 5.2 Measurement arrangement and test equipment 5.2.1 General The testing of microlenses is similar in principle to testing larger lenses. In many cases however, the measurement of very small lenses presents practical problems which make it difficult to use standard equipment. In general,
34、 two optical techniques can be used. One is based on microscopy, the other is based on interferometry. The first technique uses a microscope to locate, by focusing, the vertex of the microlens. The effective back (front) focal length is deduced from a measurement of the displacement necessary to ref
35、ocus the microscope on the image of a distant source as shown in Figure 1. A focusing aid in the microscope such as a split-field focusing graticule enables the featureless vertex of a microlens to be more readily located when viewing with reflected light. For focal length measurements the distant p
36、oint source may be the emitting tip of an optical fibre or an illuminated test graticule. Tests may be performed with white light or monochromatic illumination. The second technique uses wavefront sensing to locate the test surface or the centre of curvature. The location test may be carried out wit
37、h the help of one of the following devices: Fizeau interferometer, Twyman-Green interferometer, lateral shearing interferometer, or Shack-Hartmann device. These are more fully described in ISO 14880-2 and ISO/TR 14999-1. One advantage of interferometry is that for strongly aberrated lenses, the vari
38、ation in focal length with aperture radius can be readily deduced from the interference patterns. A disadvantage is that tests are restricted to the wavelength of the interferometer light source. Key 1 distant point source 2 substrate and microlens producing focussed spot 3 microscope objective 4 ax
39、ial adjustment of microscope to locate lens surface and focus 5 beamsplitter 6 source for focus location on lens surface 7 charge-coupled device (CCD) camera Figure 1 A collimated source and microscope used to measure the effective back or front focal length of a microlens Copyright International Or
40、ganization for Standardization Provided by IHS under license with ISO Licensee=NASA Technical Standards 1/9972545001 Not for Resale, 04/19/2007 01:56:17 MDTNo reproduction or networking permitted without license from IHS -,-,- ISO 14880-3:2006(E) ISO 2006 All rights reserved 3 Clauses 5 to 9 concent
41、rate on the microscope technique while an interferometric technique is described in Annex A and a Shack-Hartmann technique in Annex D. The confocal measurement of the effective focal lengths of lens arrays is described in Annex B. 5.2.2 Test system 5.2.2.1 General The test system consists of a micro
42、scope fitted with displacement transducers, suitable light source, test object, microscope video camera, monitor and image analyser (line intensity scan). 5.2.2.2 Microscope A microscope fitted with a focusing aid such as a split-image rangefinder is required to enable focus settings to be made on a
43、 featureless surface such as the vertex of the microlens surface. The mechanical design shall allow the distant point source or test graticule to be placed below the stage carrying the test lens. Ideally, the test lens should be supported with no additional optical component such as a glass plate be
44、tween it and the distant point source or test graticule. The displacement of the test surface relative to the microscope objective is measured with a calibrated displacement transducer. The numerical aperture (NA) of the microscope objective shall be larger than the numerical aperture of the test le
45、ns at the focal point. 5.2.2.3 Light source A light source emitting radiation in the band of wavelengths or at a specific wavelength required for the test shall be used. The properties of the light source shall be described in the experimental results report. White light can be provided by a quartz-
46、halogen lamp in combination with a suitable aperture stop. Narrow band filters can be used where a restricted range of wavelengths is required. A laser can be used for monochromatic illumination and higher intensities. 5.2.2.4 Test objects The distant point source can be approximated using the emitt
47、ing tip of an optical fibre. The distant point source shall be placed on axis with the lens and at an effectively large distance to enable the focal length to be determined. Alternatively, the object may be a graticule. This enables the optical properties at particular spatial frequencies and field
48、angles to be studied. The detection of the focus spot may be susceptible to undersampling by the detector array. The distant point source or test graticule used shall be described in the documentation of the test report. 5.2.2.5 Image display If the image generated by the microscope is relayed by a video camera to a video display, an electronic intensity display can be used to assist in locating the position of best focus. The intensity of the image at the d