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1、JAPANESE I NDUSTRIAL STANDARD Instruments for the Measurement - of Surface Roughness by the Interferometric Method Translated and Published Japanese Standards Association . - _ . -_ - -. Printed in Japan Copyright Japanese Standards Association Provided by IHS under license with JSALicensee=IHS Empl
2、oyees/1111111001, User=Wing, Bernie Not for Resale, 03/10/2007 19:16:00 MSTNo reproduction or networking permitted without license from IHS -,-,- Translation without guarantee In the event of any doubt arising, the original standard in Japanese is to be evidence B 0652-1973 Japanese Text Established
3、 by Minister of International Trade and Industry Date of Establishment: April 14, 1954 Date of Revision: October 1, 1973 Date of Public Notice in Official Gazette: October 6, 1973 Investigated by: Japanese Industrial Standards Committee Technical Committee on Instruments for the Measurement of Surfa
4、ce Roughness (Chairman: HASUNUMA Hiroshi) Divisional Council on Precjsion Machine (Chairman: TANIGUCHI Isamu) This English translation is published by: Japanese Standards Association 1-24, Akasaka 4, Minato-ku, Tokyo 107 Japan 1975 0 - -. Copyright Japanese Standards Association Provided by IHS unde
5、r license with JSALicensee=IHS Employees/1111111001, User=Wing, Bernie Not for Resale, 03/10/2007 19:16:00 MSTNo reproduction or networking permitted without license from IHS -,-,- J I S B*Ob52 73 4933b08 0008519 b - - UDC 620,179.1 18.082.54 JAPANESE INDUSTRIAL STANDARD J I S Instruments for the Me
6、asurement of Surface Roughness by the Interferometric Method B 0652-1 973 1. Scope This Japanese Industrial Standard specifies the instruments for the measurement of surface roughness by interferometric method utilizing the effect of interference fringe produced on the surface microscopically enlarg
7、ed, hereinafter referred to as the “in- strument II , 2. Construction and Function The construction of the measuring instrument and their functioning ability shall, as a rule, conf orm to the following. The measuring instrument shall generally consist of a light source, interfero- meter, microscope
8、and a photographic set. The light source shall be of monochrom, white colour source o r of those colours combined with filter, (3) The interferometer device shall be of two-beam interference system o r a multi- ple beam interference system as indicated in Figs, I to 3 with freely adjustable construc
9、tion and function regarding position, spacing and direction of interfer- ence fringes. Fig. 1 Fig. 2 Fig. 3 m f - Reference surface of reflection Reference surface of reflection -7 ._ 4. Objective Surface to Surface to be measured - u I .%! Half mirror Light source . e - - Reference surface of refle
10、ction 7- Objective- Y $=- Surface to be measured Two-beam Two-beam Multiple -be am interference system interference system interference system Applic ab1 e St andar ds : JIS B 7 I I 3-Photographic Glass Filters (Sharp-Cut Type) JIS B 71 41 -Screw Thread of Microscope Objectives JIS B 71 42-Screwed P
11、arts of Microscope Objectives and Body Tubes JIS B 71 43-Engagement between Microscope Eyepieces and Eyepiece Sleeves JIS B 7430-Optical Flats F- Copyright Japanese Standards Association Provided by IHS under license with JSALicensee=IHS Employees/1111111001, User=Wing, Bernie Not for Resale, 03/10/
12、2007 19:16:00 MSTNo reproduction or networking permitted without license from IHS -,-,- I 2 J I S B*CIb52 73 i.1933608 U008520 2 B 0652-1973 (4) The measuring instruments shall not be of the construction sensitive to vibra- tion. ( 5 ) The measuring instruments shall include the combination of objec
13、tive and eye- piece capable of measuring the object of more than 0.5 mm diameter on the measuring surf ace. (6) The objective and eyepiece of the measuring instruments must conform to the requirements of the following standards. JIS B 71 41 -Screw Thread of Microscope Objectives JIS B 7142-Screwed P
14、arts of Microscope Objectives and Body Tubes JIB B 71 43-Engagement between Microscope Eyepieces and Eyepiece Sleeves 3. Function The function of the optical portion of the measuring instruments shall be as follows. The optical portion of the measuring instruments shall not be subjected to any abera
15、tion and other ill-effects detrimental to the measurement. Further, the optical portion of the instrument shall be free from harmful flare due to the internal reflection of body tube. Among filters used in the measuring instruments, the material, appearance and efficiency of coloured glass filter sh
16、all be determined in conformity with 9 of the requirement of JIS B 71 13-Photographic Glass Filters (Sharp-Cut Type). In the interference bilter, the difference between nominal principal wave length and actual principal wave length shall be less than - + 5 %. If, in the measuring instrument, the opt
17、ical flat of Class 2 specified in JIS B 7430 is used as the surface to be measured, the distortion of interference fringes shall be less than 1/10 of a fringe interval within the field of view, The permissible range of the total microscopic magnification shall be - + 10 % of nominal magnification. C
18、opyright Japanese Standards Association Provided by IHS under license with JSALicensee=IHS Employees/1111111001, User=Wing, Bernie Not for Resale, 03/10/2007 19:16:00 MSTNo reproduction or networking permitted without license from IHS -,-,- JIS B*Ob52 73 4933b08 0008521 4 3 B 0652-1973 - _- 4. Inspe
19、ction The inspection of the measuring instruments shall be carried out in accordance with the following items No, 1 to No, 4. No. 1 2 - 3 Item Actual ield iiam- !ter Xffer- !nc e If minci- ia1 wave- ength n nter- erence ilter Distor- tion of Dptical system Measuring method ?ut metallic objective nic
20、rometer on the posi- ioning stage of the surface o be measured in order to *cad the number of gradua- ion within the field of ?yepiece, and obtain actual ield diameter from the ollowing formula, Actual field diameter = Number of graduation vithin the field of eyepiece) K (Scale interval) veasure the
21、 distribution If spectro energy of the ilter by using spectro 3hotometer and obtain the Iifference of principal wavelength from the fol- !owing formula. Difference of principal = vx 100 wavelength where, Ra : wavelength indicated R : wavelength measured Place optical flat on the positioning stage of
22、 the surface to be measured in order to make interference Fringes, and obtain the distortion from the follow- ing formula. Distortion = b n where, n : fringe interval 1) : bending of fringe Figure III Il I I II lllll111 69 deasuring nstrument Aetallic )b jec tive nicro- neter 3pectro neter ?hob- Opt
23、ical flat Eye pi e c e micro- m e t e r Ioler- anc e 1.5 mm min. - + 5 % 1/1 o max, Copyright Japanese Standards Association Provided by IHS under license with JSALicensee=IHS Employees/1111111001, User=Wing, Bernie Not for Resale, 03/10/2007 19:16:00 MSTNo reproduction or networking permitted witho
24、ut license from IHS -,-,- 4 J I S BXOb52 73 m 4933608 0008522 b m B 0652-1973 (Continued) - No - 4 Item Total micro- scope rnagni- Pication Measuring method Measure respectively the magnifications of eyepiece and objective and total microscope rnagnific ation is given by the product of magnification
25、s. 3 Measuring the magnifi- cation (iiJi) of objective. Place metallic objective micrometer on the position- ing stage of the surface to be measured, and measure the image size of enlarged scale by eyepiece rnicro- meter where, I, : length of graduation length of enlarged scale equivalent to I, Li :
26、 image 3 Measuring the magnifi- cation ( i + & ) of eyepiece. Place such as forcussing plate on the lens disk of an optical bench, and look through the microscope while turning the disk and fined the position where the image on the plate does not move, (center of rota- tion) and then read the positi
27、on of of rnicro- scope by using a scale. Next, put eyepiece on the disk and interpose Siemen star in light path. While looking through the microscope, obtain the position where the image does not move even if the disk is turned (locate the principal plane in the cen- tre of rotation), and then read
28、the position (I,) of microscope by using the scale. Figure micrometer micrometer i + I. I I Light source Microscope Lens disk $J /-Scale Ey epiec e Light 7 source Microscope I Zollimeter- Lens disk Measuring instrumen Metallic objective micro- m e t e r Eyepiece micro- m e t e r Optical bench Sierne
29、n star roler- anc e b l O % Copyright Japanese Standards Association Provided by IHS under license with JSALicensee=IHS Employees/1111111001, User=Wing, Bernie Not for Resale, 03/10/2007 19:16:00 MSTNo reproduction or networking permitted without license from IHS -,-,- 5. B 0652-1973 (Continued) Ite
30、m Measuring method Focal length of eyepiece s given by f = 14 - 13 (mm) Magnification 250 AI2 =f and the total magnification M = I V , x 1 w 2 Let the nominal total mag- iification be Mo, and the lifference between the mag- iifications Mand fil, is given Y Figure Measuring instrument 5, Marking 5, I
31、 On the body of the measuring instruments, the following particulars shall be indicated. (1 ) Name of measuring instrument (2) (3) Manufacturing No. (4) Date of manufacture Name of manufacturer or its mark 5.2 The magnification and the name of manufacturer or its mark shall be indicated on .objectiv
32、e and eyepiece set of the measuring instruments. 5.3 The principal wavelength passing through the filter shall be indicated in in- struction book o r other literature. oler- anc e Copyright Japanese Standards Association Provided by IHS under license with JSALicensee=IHS Employees/1111111001, User=Wing, Bernie Not for Resale, 03/10/2007 19:16:00 MSTNo reproduction or networking permitted without license from IHS -,-,-