1、ISOInternationalStandardISO25178-605Secondedition2025-02Geometricalproductspecifications(GPS)Surfacetexture:ArealPart605:Designandcharacteristicsofnoncontact(pointautofocusprobe)instrumentsSpecificationgeometriquedesproduits(GPS)Etatdesurface:Surfacique一Partie605:ConceptionetCaracteristiquesdesinstr
2、umentssanscontact(capteurautofocusapoint)ReferencenumberISO25178-605:2025(en)COPYRIGHTPROTECTEDDOCUMENTISO2025Allrightsreserved.Unlessotherwisespecified,orrequiredinthecontextofitsimplementation,nopartofthispublicationmaybereproducedorutilizedotherwiseinanyformorbyanymeans,electronicormechanical,inc
3、ludingphotocopying,orpostingontheinternetoranintranet,withoutpriorwrittenpermission.PermissioncanberequestedfromeitherISOattheaddressbeloworISO,smemberbodyinthecountryoftherequester.ISOcopyrightofficeCP401Ch.deBlandonnet8CH-1214Vernier,GenevaPhone:+41227490111Email:copyrightiso.orgWebsite:www.iso.or
4、gPublishedinSwitzerlandContentsPageForewordivIntroductionv1 Scope12 Normativereferences13 Termsanddefinitions14 Instrumentrequirements35 Metrologicalcharacteristics46 Designfeatures47 Generalinformation4Annex A (informative)PrinciplesofPAPinstrumentsforarealsurfacetopographymeasurement5Annex B (info
5、rmative)SourcesofmeasurementerrorforPAPinstruments9Annex C (informative)RelationshiptotheGPSmatrixmodel15Bibliography16ForewordISO(theInternationalOrganizationforStandardization)isaworldwidefederationofnationalstandardsbodies(ISOmemberbodies).TheworkofpreparingInternationalStandardsisnormallycarried
6、outthroughISOtechnicalcommittees.Eachmemberbodyinterestedinasubjectforwhichatechnicalcommitteehasbeenestablishedhastherighttoberepresentedonthatcommittee.Internationalorganizations,governmentalandnon-governmental,inliaisonwithISO,alsotakepartinthework.ISOcollaboratescloselywiththeInternationalElectr
7、otechnicalCommission(IEC)onallmattersofelectrotechnicalstandardization.TheproceduresusedtodevelopthisdocumentandthoseintendedforitsfurthermaintenancearedescribedintheISO/IECDirectives,Part1.Inparticular,thedifferentapprovalcriterianeededforthedifferenttypesofISOdocumentshouldbenoted.Thisdocumentwasd
8、raftedinaccordancewiththeeditorialrulesoftheISO/IECDirectives,Part2(seeWWW.iso.org/directives).ISOdrawsattentiontothepossibilitythattheimplementationofthisdocumentmayinvolvetheuseof（八）patent(三).ISOtakesnopositionconcerningtheevidence,validityorapplicabilityofanyclaimedpatentrightsinrespectthereof.As
9、ofthedateofpublicationofthisdocument,ISOhadnotreceivednoticeof（八）patent(三)whichmayberequiredtoimplementthisdocument.HoweverlImplementersarecautionedthatthismaynotrepresentthelatestinformation,whichmaybeobtainedfromthepatentdatabaseavailableatWWW.iso.org/patents.ISOshallnotbeheldresponsibleforidentif
10、yinganyorallsuchpatentrights.Anytradenameusedinthisdocumentisinformationgivenfortheconvenienceofusersanddoesnotconstituteanendorsement.Foranexplanationofthevoluntarynatureofstandards,themeaningofISOspecifictermsandexpressionsrelatedtoconformityassessment,aswellasinformationaboutISOsadherencetotheWor
11、ldTradeOrganization(WTO)principlesintheTechnicalBarrierstoTrade(TBT),seeWWW.iso.org/iso/foreword.htmLThisdocumentwaspreparedbyTechnicalCommitteeISO/TC213,Dimensionalandgeometricalproductspecificationsandverification,incollaborationwiththeEuropeanCommitteeforStandardization(CEN)TechnicalCommitteeCEN/
12、TC290,Dimensionalandgeometricalproductspecificationandverification,inaccordancewiththeAgreementontechnicalcooperationbetweenISOandCEN(ViennaAgreement).Thissecondeditioncancelsandreplacesthefirstedition(ISO25178-605:2014),whichhasbeentechnicallyrevised.Themainchangesareasfollows: removalofthetermsand
13、definitionsnowspecifiedinISO25178-600; revisionofalltermsanddefinitionsforclarityandconsistencywithotherISOstandardsdocuments; additionofClaUSQ4forinstrumentrequirements,whichsummarizesnormativefeaturesandcharacteristics; additionofClaUSe5onmetrologicalcharacteristics; additionofClauseeondesignfeatu
14、res,whichclarifiesthetypesofinstrumentsrelevanttothisdocument; additionofaninformationflowconceptdiagraminClause4; revisionofAnneXAdescribingtheprinciplesofinstrumentsaddressedbythisdocument; additionofArmeXBonmetrologicalcharacteristicsandinfluencequantities;replacementofthenormativetableofinfluenc
15、equantitieswithaninformativedescriptionofcommonerrorsourcesandhowtheserelatethemetrologicalcharacteristicsinISO25178-600.AlistofallpartsintheISO25178seriescanbefoundontheISOwebsite.Anyfeedbackorquestionsonthisdocumentshouldbedirectedtotheusersnationalstandardsbody.Acompletelistingofthesebodiescanbef
16、oundatWWW.iso.org/membnrs.html.IntroductionThisdocumentisageometricalproductspecification(GPS)standardandistoberegardedasageneralGPSstandard(seeISO14638).ItinfluenceschainlinkFofthechainsofstandardsonprofileandarealsurfacetexture.TheISOGPSmatrixmodelgiveninIS014638givesanoverviewoftheISOGPSsystemofw
17、hichthisdocumentisapart.ThefundamentalrulesofISOGPSgiveninISO8015applytothisdocumentandthedefaultdecisionrulesgiveninISO14253-1applytothespecificationsmadeinaccordancewiththisdocument,unlessotherwiseindicated.FormoredetailedinformationontherelationofthisdocumenttootherstandardsandtheGPSmatrixmodel,s
18、eeAnnexC.Thisdocumentincludestermsanddefinitionsrelevanttothepointautofocusprobe(PAP)instrumentsforthemeasurementofarealsurfacetopography.AnneXAbrieflysummarizesPAPinstrumentsandmethodstoclarifythedefinitionsandtoprovideafoundationforArmeXB,whichdescribescommonsourcesofuncertaintyandtheirrelationtot
19、hemetrologicalcharacteristicsofPAP.NOTEPortionsofthisdocument,particularlytheinformativesections,describepatentedsystemsandmethods.ThisinformationisprovidedonlytoassistusersinunderstandingtheoperatingprinciplesofPAPinstruments.Thisdocumentisnotintendedtoestablishpriorityforanyintellectualproperty,no
20、rdoesitimplyalicensetoproprietarytechnologiesdescribedherein.ISO25178-InternationalStandard60H2025(m)Geometricalproductspecifications(GPS)Surfacetexture:Areal一Part605:Designandcharacteristicsofnon-contact(pointautofocusprobe)instruments1 ScopeThisdocumentspecifiesthedesignandmetrologicalcharacterist
21、icsofpointautofocusprobe(PAP)instrumentsforthearealmeasurementofsurfacetopography.Becausesurfaceprofilescanbeextractedfromarealsurfacetopographydata,themethodsdescribedinthisdocumentarealsoapplicabletoprofilingmeasurements.2 NormativereferencesThefollowingdocumentsarereferredtointhetextinsuchawaytha
22、tsomeoralloftheircontentconstitutesrequirementsofthisdocument.Fordatedreferences,onlytheeditioncitedapplies.Forundatedreferences,thelatesteditionofthereferenceddocument(includinganyamendments)applies.ISO25178-600:2019,Geometricalproductspecifications(GPS)Surfacetexture:ArealPart600:MetroIogicalchara
23、cteristicsforarealtopographymeasuringmethods3 TermsanddefinitionsForthepurposesofthisdocument,thetermsanddefinitionsgiveninISO25178-600andthefollowingapply.ISOandIECmaintainterminologydatabasesforuseinstandardizationatthefollowingaddresses: ISOOnlinebrowsingplatform:availableathttps:WWW.iso.org/obp
24、IECElectropedia:availableathttps:WWW.electropedia.org/3.1probingsystemcomponentoftheinstrumentconsistingofanautofocusopticalsystem,anautofocusmechanism(3.6)andanelectroniccontroller3.2pointautofocusprobePAPdevicethatconvertstheheightofapointonasurfaceintoasignalduringmeasurementusingtheautofocusfunc
25、tion3.3pointautofocusprofilingsurfacetopographymeasurementmethodwherebythelocalsurfaceheightismeasuredbyautomaticallycentringafocusedlightbeamreflectedfromthesampleonapositionsensitivedetectorasafunctionofsurfaceheightSOURCE:ISO25178-6:2010,3.3,113.4objectivelensthatfocusesthelightsourceimageonthewo
26、rkpiecesurface3.5autofocussensoropticalsensorthatdetectsafocalpositionusingthelightreflectedfromtheworkpiecesurface3.6autofocusmechanismautofocusdrivingmechanismthatpositionsopticalelementsorthewholeopticalsystem3.7z-positionsensorsensorthatmeasurestheverticalpositionofthemeasuredpoint3.8workingdist
27、ancedistancealongtheopticalaxisbetweentheelementclosesttothesurfaceandthefocuspointonthesurfaceNote1toentry:Maximummeasurablestepheightisrelatedtoworkingdistance.3.9spotsizeWSPoTsizeofthelightsourceimagefocusedontheworkpiecesurfaceNote1toentry:SeeCIoUSeB23.10focusrangerangeofZheights,withinwhichitis
28、possibletoachieveadequatefocus3.11verticalrangeRVERTmeasuringrangeoftheautofocusprobeinZheightswithinwhichitispossibletooutputreliabledata3.12measurableminimumreflectionratioMREFminimumrat100fthereflectedlightintensitytotheincidentlightintensityforameasurableworkpiecesurface3.13autofocusrepeatabilit
29、yRAFmeasurementrepeatabilityoftheautofocusfunction,excludingtheeffectofenvironmentalnoise3.14specklenoiseNyvSPCnoiseduetonon-uniformintensityofreflectedlightgeneratedbyirregularmicro-scalegeometryoftheworkpiecesurfacewithinthespotsize(3.9)Note1toentry:RefertoReference10.3.15temperaturedriftdeviation
30、DrEMx，DrEMyTEMzformdeviationcausedbychangesintemperatureNote1toentry:Thisdeviationistypicallymanagedbyincreasingmeasurementspeedandreducingtherateorrangeoftemperaturevariation.Note2toentry:RefertoReference14.3.16beamoffsetdirectiondirectionoftheoffsetofthelightsourceopticalaxisfromtheopticalaxisofth
31、eobjective(3.4)Note1toentry:SeeClaUSeB.4.4InstrumentrequirementsAninstrumentaccordingtothisdocumentshallperformanarealsurfacetopographymeasurementofasurfaceusingpointautofocusprofiling.TheinstrumentshallcompriseaPAPandalateralscanningsystem.ThePAPinstrumentshallcompriseanobjective,anautofocussensor,
32、az-positionsensorandanautofocusmechanismforautomaticallymeasuringalocalheightofthesurface.Theinstrumentshallacquiredatabyscanningthesurfaceinx-andy-directionswhileautofocusingonit.Theinstrumentshallsaveacquiredpointclouddatainordertogenerateanarealtopography.FigUre1showstheinformationflowbetweenthes
33、eelementsforaPAPinstrument,flowingfromaworkpiecesurfacetoaprimarysurface.ExamplesofPAPinstrumenthardware,techniquesanderrorsourcesaregiveninAnneXeSAandB.ISO2025-AllrightsreservedZscanningsystemsprobingsystemmeasurandoperatorwithintendedmodificationoperatorwithoutintendedmodificationFigure1Informatio
34、nflowconceptdiagramforaPAPinstrument5 MetrologicalcharacteristicsThestandardmetrologicalcharacteristicsforarealsurfacetexturemeasuringinstrumentsspecifiedinISO25178-600shallbeconsideredwhendesigningandcalibratingtheinstrument.Additionalmetrologicalcharacteristicsorerrorsources,orboth,foraninstrument
35、accordingtothisdocumentconsistofworkingdistance,spotsize,focusrange,verticalrange,measurableminimumreflectionratio,autofocusrepeatability,specklenoise,temperaturedriftdeviationandbeamoffsetdirection.Allshallbeconsideredwhendesigningandcalibratingtheinstrument.ArmeXBdescribessourcesofmeasurementerror
36、thatcaninfluencethecalibrationresult.6 DesignfeaturesStandarddesignfeaturesdescribedinISO25178-600shallbeconsideredinthedesign.AnneXAprovidesexamplesofspecificdesignfeaturesofPAPinstruments.7 GeneralinformationTherelationshipbetweenthisdocumentandtheGPSmatrixmodelisgiveninAneeXC.AnnexA(informative)P
37、rinciplesofPAPinstrumentsforarealsurfacetopographymeasurementA.lGeneralPAPinstrumentsmeasuresurfacetexturebyautomaticallyfocusingalaserbeamontoapointontheworkpiecesurface,movingtheworkpiecesurfacewithfixedsamplingintervalsusinganx-yscanningstage,andmeasuringtheworkpiecesurfaceheightateachfocusedpoin
38、t.A.2InstrumentdesignFigUreA.lillustratesatypicalopticalsystemforPAPinstruments.Alaserbeamthatcanbefocusedtoasmallspotisgenerallyusedforthelightsource.Theopticalaxisofthelaserbeampassesthroughtheleft-handsideoftheobjectiveandfocusesontotheworkpiecesurfaceatthecentreoftheopticalaxis.Thereflectedlaser
39、beampassesthroughtheright-handsideoftheobjectiveandformsanimageontheautofocussensorafterpassingthroughtheimaginglens.FigUreA.lshowsthe”in-focus“state.FigUreA.2showstheprincipleoftheautofocusoperation.FigUreA.2a)showsthein-focusstate.FigureA.2b)showsthedefocusedstate.Whentheworkpiecesurfaceisdisplace
40、ddownward(z),thelaserbeampositionontheautofocussensorchangesaccordingly.Theautofocussensordetectsthelaserspotposition;hence,thesensordetectsthelaserspotdisplacementW)andfeedsthisinformationbacktotheautofocusmechanisminordertoadjusttheobjectivetothein-focusposition.FigUreA.2c)showstherefocusstate.The
41、displacementoftheworkpiecesurfacez)isequaljtothemovingdistanceoftheobjective（三）,andthexpositionsensor(typically,alinearpositionscaleisused)acquirestheheightinformationontheworkpiece.AdistinctivefeatureofPAPinstrumentsisthattheyarenotinfluencedbythecolourorreflectioncoefficientsofworkpiecesurfacessin
42、cetheautofocussensordetectsthepositionofthelaserspot,nottheintensity.Also,PAPinstrumentshaveawidemeasuringrangeandhighresolutionintheZ-CoOrdinate,whichisequivalenttothemovablerange,andrepeatabilityoftheautofocusmechanism.NOTERefertoReferences8,9,121,13,15,161,17forfurtherdetails.2 imagelens3 lightso
43、urce4 z-positionsensor5 workpiece6 laserbeam8 autofocusmechanism9 objective10 measurementpoint11 x-andy-scanningstageFigureA.lSchematicdiagramofatypicalPAPinstrumenta)In-focusstateKeyWzzlaserspotdisplacementonthedetectorworkpiecesurfaceheightdownwarddisplacementoftheworkpiecesurfacez1displacementoft
44、heworkpiecesurfacez2movingdistanceoftheobjectiveFigureA.2PrincipleofatypicalPAPoperationA.3PAPinstrumentAtypicalPAPinstrumentiscomposedofalateralscanningsystemandaPAP.Thistypeofinstrumentisalsoabletoperformprofilemeasurements.Therangeofheightmeasurementisdeterminedbythemovablerangeoftheautofocusmech
45、anismandtheworkingdistanceoftheobjective.Atypicalmeasuringrangeisfromafewmillimetrestoseveraltensofmillimetres.A.4MeasurementprocessAtypicalPAPinstrumentusesthefollowingmeasurementprocess. Theprobingsystemperformsprofileacquisitionthroughcontinuousmeasurementalongthex-axisovermeasuringlength. Aftert
46、heprofilehasbeenmeasured,theprobingsystemreturnstoitsstartingpositionofeachprofile. Theperpendiculardriveunitalongthey-axisstepsbyonesamplingintervalalongthey-axis. Theseoperationsarerepeateduntilthemeasurementiscompleted.一Therawsurfaceisthenobtained.Itcontainsnprofilesseparatedfromeachotherbythey-s
47、amplinginterval,eachprofilecontainingmpointsseparatedbythex-samplinginterval.Itisalsopossibletoperformthemeasurementwithoutreturningtothestartingpositionafteracquiringeachprofile.Thenextprofilecanbescannedintheoppositedirectioncomparedtothepreviousscan.Inthiscase,itisrecommendedtocheckthattherepositioninghysteresisiscompatiblewiththeintendedmeasurementuncertainty.Nevertheless,atypicalprobingsystemisgenerallydesignedformeasuringinonlyonedirection.RecommendationsforchoosingmeasuringareaandsamplingintervalsarefoundinISO25178-
免费区 
