《NFPA 318-2000 Standard for the Protection of Cleanrooms.pdf》由会员分享，可在线阅读，更多相关《NFPA 318-2000 Standard for the Protection of Cleanrooms.pdf（26页珍藏版）》请在三一文库上搜索。
1、NFPA 318 Standard for the Protection of Cleanrooms 2000 Edition NFPA, 1 Batterymarch Park, PO Box 9101, Quincy, MA 02269-9101 An International Codes and Standards Organization NFPA License Agreement This document is copyrighted by the National Fire Protection Association (NFPA), 1 Batterymarch Park,
2、 Quincy, MA 02269-9101 USA. All rights reserved. NFPA grants you a license as follows: The right to download an electronic file of this NFPA document for temporary storage on one computer for purposes of viewing and/or printing one copy of the NFPA document for individual use. Neither the electronic
3、 file nor the hard copy print may be reproduced in any way. In addition, the electronic file may not be distributed elsewhere over computer networks or otherwise. The hard copy print may only be used personally or distributed to other employees for their internal use within your organization. 8/00 C
4、opyright NFPA One Batterymarch Park Quincy, Massachusetts 02269 IMPORTANT NOTICE ABOUT THIS DOCUMENT NFPA codes, standards, recommended practices, and guides, of which the document contained herein is one, are developed through a consensus standards development process approved by the American Natio
5、nal Standards Institute. This process brings together volunteers representing varied viewpoints and interests to achieve consensus on fire and other safety issues. While the NFPA administers the process and establishes rules to promote fairness in the development of consensus, it does not independen
6、tly test, evaluate, or verify the accuracy of any information or the soundness of any judgments contained in its codes and standards. The NFPA disclaims liability for any personal injury, property or other damages of any nature whatsoever, whether special, indirect, consequential or compensatory, di
7、rectly or indirectly resulting from the publication, use of, or reliance on this document. The NFPA also makes no guaranty or warranty as to the accuracy or completeness of any information published herein. In issuing and making this document available, the NFPA is not undertaking to render professi
8、onal or other services for or on behalf of any person or entity. Nor is the NFPA undertaking to perform any duty owed by any person or entity to someone else. Anyone using this document should rely on his or her own independent judgment or, as appropriate, seek the advice of a competent professional
9、 in determining the exercise of reasonable care in any given circumstances. The NFPA has no power, nor does it undertake, to police or enforce compliance with the contents of this document. Nor does the NFPA list, certify, test or inspect products, designs, or installations for compliance with this
10、document. Any certification or other statement of compliance with the requirements of this document shall not be attributable to the NFPA and is solely the responsibility of the certifier or maker of the statement. See inside back cover for additional important notices and information. NOTICES All q
11、uestions or other communications relating to this document and all requests for information on NFPA procedures governing its codes and standards development process, including information on the procedures for requesting Formal Interpretations, for proposing Tentative Interim Amendments, and for pro
12、posing revisions to NFPA documents during regular revision cycles, should be sent to NFPA headquarters, addressed to the attention of the Secretary, Standards Council, National Fire Protection Association, 1 Batterymarch Park, P.O. Box 9101, Quincy, MA 02269-9101. Users of this document should be aw
13、are that this document may be amended from time to time through the issuance of Tentative Interim Amendments, and that an official NFPA document at any point in time consists of the current edition of the document together with any Tentative Interim Amendments then in effect. In order to determine w
14、hether this document is the current edition and whether it has been amended through the issuance of Tentative Interim Amendments, consult appropriate NFPA publications such as the National Fire Codes Subscription Service, visit the NFPA website at www.nfpa.org, or contact the NFPA at the address lis
15、ted above. A statement, written or oral, that is not processed in accordance with Section 6 of the Regulations Governing Committee Projects shall not be considered the official position of NFPA or any of its Committees and shall not be considered to be, nor be relied upon as, a Formal Interpretation
16、. The NFPA does not take any position with respect to the validity of any patent rights asserted in connection with any items which are mentioned in or are the subject of this document, and the NFPA disclaims liability for the infringement of any patent resulting from the use of or reliance on this
17、document. Users of this document are expressly advised that determination of the validity of any such patent rights, and the risk of infringement of such rights, is entirely their own responsibility. Users of this document should consult applicable federal, state, and local laws and regulations. NFP
18、A does not, by the publication of this document, intend to urge action that is not in compliance with applicable laws, and this document may not be construed as doing so. 8/00 Licensing Policy This document is copyrighted by the National Fire Protection Association (NFPA). By making this document av
19、ailable for use and adoption by public authorities and others, the NFPA does not waive any rights in copyright to this document. 1. Adoption by ReferencePublic authorities and others are urged to reference this document in laws, ordinances, regulations, administrative orders, or similar instruments.
20、 Any deletions, additions, and changes desired by the adopting authority must be noted separately. Those using this method are requested to notify the NFPA (Attention: Secretary, Standards Council) in writing of such use. The term “adoption by reference“ means the citing of title and publishing info
21、rmation only. 2. Adoption by TranscriptionA. Public authorities with lawmaking or rule-making powers only, upon written notice to the NFPA (Attention: Secretary, Standards Council), will be granted a royalty-free license to print and republish this document in whole or in part, with changes and addi
22、tions, if any, noted separately, in laws, ordinances, regulations, administrative orders, or similar instruments having the force of law, provided that: (1) due notice of NFPAs copyright is contained in each law and in each copy thereof; and (2) that such printing and republication is limited to num
23、bers sufficient to satisfy the jurisdictions lawmaking or rule-making process. B. Once this NFPA Code or Standard has been adopted into law, all printings of this document by public authorities with lawmaking or rule- making powers or any other persons desiring to reproduce this document or its cont
24、ents as adopted by the jurisdiction in whole or in part, in any form, upon written request to NFPA (Attention: Secretary, Standards Council), will be granted a nonexclusive license to print, republish, and vend this document in whole or in part, with changes and additions, if any, noted separately,
25、provided that due notice of NFPAs copyright is contained in each copy. Such license shall be granted only upon agreement to pay NFPA a royalty. This royalty is required to provide funds for the research and development necessary to continue the work of NFPA and its volunteers in continually updating
26、 and revising NFPA standards. Under certain circumstances, public authorities with lawmaking or rule-making powers may apply for and may receive a special royalty where the public interest will be served thereby. 3. Scope of License GrantThe terms and conditions set forth above do not extend to the
27、index of this document. (For further explanation, see the Policy Concerning the Adoption, Printing, and Publication of NFPA Documents, which is available upon request from the NFPA.) 3181 Copyright 2000 NFPA, All Rights Reserved NFPA 318 Standard for the Protection of Cleanrooms 2000 Edition This ed
28、ition of NFPA 318, Standard for the Protection of Cleanrooms, was prepared by the Tech- nical Committee on Cleanrooms and acted on by the National Fire Protection Association, Inc., at its World Fire Safety Congress and Exposition held May 1417, 2000, in Denver, CO. It was issued by the Standards Co
29、uncil on July 20, 2000, with an effective date of August 18, 2000, and supersedes all previous editions. This edition of NFPA 318 was approved as an American National Standard on August 18, 2000. Origin and Development of NFPA 318 The Committee on Cleanrooms was formed in 1988 and held its first mee
30、ting during May of that year. The Committee was organized into chapter subcommittees that separately pre- pared individual chapters and related appendix material for review by the full Committee at meetings held October 1988, March 1989, September 1989, March 1990, September 1990, and June 1991. The
31、 standard was submitted and adopted at the Fall Meeting in Montral in 1991. The 1992 edition was the first edition of this standard. The standard was revised in 1995. The 1998 edition was a partial revision of the standard. The 2000 edition is a partial revision of the standard. 3182PROTECTION OF CL
32、EANROOMS 2000 Edition Technical Committee on Cleanrooms David A. Quadrini, Chair Marsh Risk Consulting, TX I Vincent A. DeGiorgio, Secretary Technology Risk Consulting Services, LLC, MA SE Roger B. Benson, FM Global, CA I Aimee Bordeaux, Semiconductor Equipment decomposition of mol- ecules; and runa
33、way polymerization (usually detonations) or from physical changes (e.g., pressure tank ruptures). 1.5.8 Flammable Vapors. A concentration of flammable con- stituents in air that exceeds 10 percent of its lower flammable limit (LFL). 1.5.9* Hazardous Chemical. Any solid, liquid, or gas that has a deg
34、ree-of-hazard rating in health, flammability, or reactivity of Class 3 or 4 as ranked by NFPA 704, Standard System for the Identification of the Hazards of Materials for Emergency Response. 1.5.10 Interface. That place at which independent systems meet and act on or communicate with each other. 1.5.
35、11 Interlock. An arrangement in which the operation of one part or mechanism automatically brings about or prevents the operation of another. 1.5.12 Liquid. For the purpose of this standard, any material that has a fluidity greater than that of 300 penetration asphalt when tested in accordance with
36、ASTM D 5, Standard Test Method for Penetration of Bituminous Materials. When not other- wise identified, the term liquid will mean both flammable and combustible liquids: (a) Liquid, Combustible. A liquid having a flash point at or above 100F (37.8C). Combustible liquids are subdivided as follows: (
37、1) Class II liquids include those having flash points at or above 100F (37.8C) and below 140F (60C); (2) Class IIIA liquids include those having flash points at or above 140F (60C) and below 200F (93C); (3) Class IIIB liquids include those having flash points at or above 200F (93C); (b) Liquid, Flam
38、mable. A liquid having a flash point below 100F (37.8C) and having a vapor pressure not exceeding 40 psia (2068 mm Hg) at 100F (37.8C); known as a Class I liquid. Class I liquids are subdivided as follows: (1) Class IA liquids include those having flash points below 73F (22.8C) and having a boiling
39、point below 100F (37.8C); (2) Class IB liquids include those having flash points below 73F (22.8C) and having a boiling point at or above 100F (37.8C); (3) Class IC liquids include those having flash points at or above 73F (22.8C) and below 100F (37.8C). FIRE PROTECTION3185 2000 Edition 1.5.13* List
40、ed. Equipment, materials, or services included in a list published by an organization that is acceptable to the authority having jurisdiction and concerned with evaluation of products or services, that maintains periodic inspection of production of listed equipment or materials or periodic eval- uat
41、ion of services, and whose listing states that either the equipment, material, or service meets appropriate designated standards or has been tested and found suitable for a specified purpose. 1.5.14 Noncombustible. A material that, in the form in which it is used and under the conditions anticipated
42、, will not ignite, burn, support combustion, or release flammable vapors when subjected to fire or heat. Materials that are reported as passing ASTM E 136, Standard Test Method for Behavior of Materials in a Vertical Tube Furnace at 750 Degrees C, are considered noncom- bustible. (See NFPA 220, Stan
43、dard on Types of Building Construc- tion.) 1.5.15 Pass-through. An enclosure, installed in a wall and with a door on each side, that allows chemicals, production materials, equipment, and parts to be transferred from one side of the wall to the other. 1.5.16 Pyrophoric. A chemical with an autoigniti
44、on tempera- ture in air at or below 130F (54.4C). 1.5.17 Restricted-Flow Orifice. A device located in the gas cylinder valve body that restricts the maximum flow rate to 1.06 cfm (30 L/min). 1.5.18 Shall. Indicates a mandatory requirement. 1.5.19 Should. Indicates a recommendation or that which is a
45、dvised but not required. 1.5.20 Smoke. The airborne solid and liquid particulates and gases evolved when a material undergoes pyrolysis or combus- tion, together with the quantity of air that is entrained or oth- erwise mixed into the mass. 1.5.21 Standard. A document, the main text of which con- ta
46、ins only mandatory provisions using the word “shall” to indi- cate requirements and which is in a form generally suitable for mandatory reference by another standard or code or for adop- tion into law. Nonmandatory provisions shall be located in an appendix, footnote, or fine-print note and are not
47、to be con- sidered a part of the requirements of a standard. 1.5.22 Standby Mode. A mode wherein all flow of flammable gas or liquid ceases and heaters have power removed. 1.5.23 Third Party. A professional, qualified as the result of training, education, and experience, who can perform a com- plian
48、ce and hazardous analysis of process equipment in accor- dance with this standard. 1.5.24 Tool. Any device, storage cabinet, workstation, or pro- cess machine used in the cleanroom. 1.5.25* Workstation. A defined space or an independent, principal piece of equipment using hazardous chemicals within
49、a cleanroom or clean zone, where a specific function, a laboratory procedure, or a research activity occurs. The work- station might include connected cabinets and contain ventila- tion equipment, fire protection devices, sensors for gas and other hazards, electrical devices, and other processing and sci- entific equipment. Chapter 2 Fire Protection 2.1 Automatic Fire Extinguishing Systems. 2.1.1* General. Wet pipe automatic sprinkler protection shall be provided throughout facilities containing cleanrooms and clean zones. 2.1.2 Automatic S