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1、a Date: 14 June 2007 Origin: International Latest date for receipt of comments: 30 September 2007 Project no.: 2006/01869 Responsible committee: GEL/44 Safety of machinery - Electrotechnical aspects Interested committees: Title: Draft BS IEC 60204-33 Safety of machinery Electrical equipment of machi
2、nes Part 33: Requirements for semiconductor fabrication equipment Supersession information: If this document is published as a standard, the UK implementation of it will supersede NONE and partially supersede. NONE If you are aware of a current national standard which may be affected, please notify
3、the secretary (contact details below). WARNING: THIS IS A DRAFT AND MUST NOT BE REGARDED OR USED AS A BRITISH STANDARD. THIS DRAFT IS NOT CURRENT BEYOND 30 September 2007. This draft is issued to allow comments from interested parties; all comments will be given consideration prior to publication. N
4、o acknowledgement will normally be sent. See overleaf for information on commenting. No copying is allowed, in any form, without prior written permission from BSI except as permitted under the Copyright, Designs and Patent Act 1988 or for circulation within a nominating organization for briefing pur
5、poses. Electronic circulation is limited to dissemination by e-mail within such an organization by committee members. Further copies of this draft may be purchased from BSI Customer Services, Tel: +44(0) 20 8996 9001 or email ordersbsi-. British, International and foreign standards are also availabl
6、e from BSI Customer Services. British Standards on CD or Online are available from British Standards Publishing Sales Limited. Tel: 01344 404409 or email bsonlinetechindex.co.uk. Information on the co-operating organizations represented on the committees referenced above may be obtained from the res
7、ponsible committee secretary. Cross-references The British Standards which implement International or European publications referred to in this draft may be found via the British Standards Online Service on the BSI web site http:/www.bsi-. Direct tel: 020 8996 7424 Responsible Committee Secretary: M
8、r P Restell (BSI) E-mail: peter.restellbsi- Draft for Public Comment Head Office 389 Chiswick High Road London W4 4AL Telephone: +44(0)20 8996 9000 Fax: +44(0)20 8996 7001 Form 36 Version 7.0 DPC: 07/30153021 DC Licensed Copy: London South Bank University, London South Bank University, Tue Jul 03 01
9、:06:32 GMT+00:00 2007, Uncontrolled Copy, (c) BSI b Introduction This draft standard is based on international discussions in which the UK has taken an active part. Your comments on this draft are welcome and will assist in the preparation of the consequent standard. If no comments are received to t
10、he contrary, then the UK will approve this draft. There is a high probability that this text could be adopted by CENELEC as a reference document for harmonization or as a European Standard. Recipients of this draft are requested to comment on the text bearing in mind this possibility. UK Vote Please
11、 indicate whether you consider the UK should submit a negative (with reasons) or positive vote on this draft. Submission The guidance given below is intended to ensure that all comments receive efficient and appropriate attention by the responsible BSI committee. Annotated drafts are not acceptable
12、and will be rejected. All comments must be submitted, preferably electronically, to the Responsible Committee Secretary at the address given on the front cover. Comments should be compatible with Version 6.0 or Version 97 of Microsoft Word for Windows, if possible; otherwise comments in ASCII text f
13、ormat are acceptable. Any comments not submitted electronically should still adhere to these format requirements. All comments submitted should be presented as given in the example below. Further information on submitting comments and how to obtain a blank electronic version of a comment form are av
14、ailable from the BSI web site at: http:/www.bsi- Template for comments and secretariat observations Date: xx/xx/200x Document: ISO/DIS xxxxx 1 2 (3) 4 5 (6) (7) MB Clause No./ Subclause No./ Annex (e.g. 3.1) Paragraph/ Figure/Table/ Note (e.g. Table 1) Type of com- ment Comment (justification for ch
15、ange) by the MB Proposed change by the MB Secretariat observations on each comment submitted 3.1 Definition 1 ed Definition is ambiguous and needs clarifying. Amend to read . so that the mains connector to which no connection . 6.4 Paragraph 2 te The use of the UV photometer as an alternative cannot
16、 be supported as serious problems have been encountered in its use in the UK. Delete reference to UV photometer. Microsoft and MS-DOS are registered trademarks, and Windows is a trademark of Microsoft Corporation. Licensed Copy: London South Bank University, London South Bank University, Tue Jul 03
17、01:06:32 GMT+00:00 2007, Uncontrolled Copy, (c) BSI FORM CDV (IEC) 2005-09-23 44/558/CDV COMMITTEE DRAFT FOR VOTE (CDV) PROJET DE COMIT POUR VOTE (CDV) Project number IEC 60204-33 Ed.1.0 Numro de projet IEC/TC or SC: 44 CEI/CE ou SC: Secretariat / Secrtariat United Kingdom Submitted for parallel vot
18、ing in CENELEC Soumis au vote parallle au CENELEC Date of circulation Date de diffusion 2007-06-08 Closing date for voting (Voting mandatory for P-members) Date de clture du vote (Vote obligatoire pour les membres (P) 2007-11-09 Also of interest to the following committees Intresse galement les comi
19、ts suivants TC 66 Supersedes document Remplace le document 44/519/CD and 44/537A/CC Functions concerned Fonctions concernes Safety Scurit EMC CEM Environment Environnement Quality assurance Assurance qualit CE DOCUMENT EST TOUJOURS LTUDE ET SUSCEPTIBLE DE MODIFICATION. IL NE PEUT SERVIR DE RFRENCE.
20、LES RCIPIENDAIRES DU PRSENT DOCUMENT SONT INVITS PRSENTER, AVEC LEURS OBSERVATIONS, LA NOTIFICATION DES DROITS DE PROPRIT DONT ILS AURAIENT VENTUELLEMENT CONNAISSANCE ET FOURNIR UNE DOCUMENTATION EXPLICATIVE. THIS DOCUMENT IS STILL UNDER STUDY AND SUBJECT TO CHANGE. IT SHOULD NOT BE USED FOR REFEREN
21、CE PURPOSES. RECIPIENTS OF THIS DOCUMENT ARE INVITED TO SUBMIT, WITH THEIR COMMENTS, NOTIFICATION OF ANY RELEVANT PATENT RIGHTS OF WHICH THEY ARE AWARE AND TO PROVIDE SUPPORTING DOCUMENTATION. Titre : CEI 60204-33: Scurit des machines Equipement lectrique des machines Partie 33: Exigences pour les q
22、uipements de fabrication des semi-conducteurs Title : IEC 60204-33: Safety of machinery Electrical equipment of machines Part 33: Requirements for semiconductor fabrication equipment ATTENTION VOTE PARALLLE CEI CENELEC Lattention des Comits nationaux de la CEI, membres du CENELEC, est attire sur le
23、fait que ce projet de comit pour vote (CDV) de Norme internationale est soumis au vote parallle. Un bulletin de vote spar pour le vote CENELEC leur sera envoy par le Secrtariat Central du CENELEC. ATTENTION IEC CENELEC PARALLEL VOTING The attention of IEC National Committees, members of CENELEC, is
24、drawn to the fact that this Committee Draft for Vote (CDV) for an International Standard is submitted for parallel voting. A separate form for CENELEC voting will be sent to them by the CENELEC Central Secretariat. Copyright 2007 International Electrotechnical Commission, IEC. All rights reserved. I
25、t is permitted to download this electronic file, to make a copy and to print out the content for the sole purpose of preparing National Committee positions. You may not copy or “mirror“ the file or printed version of the document, or any part of it, for any other purpose without permission in writin
26、g from IEC. Licensed Copy: London South Bank University, London South Bank University, Tue Jul 03 01:06:32 GMT+00:00 2007, Uncontrolled Copy, (c) BSI 60204-33/Ed.1 CDV IEC 2 CONTENTS 1 Scope.12 2 Normative references13 3 Definitions 15 4 General requirements .24 4.1 General considerations24 4.2 Sele
27、ction of electrical equipment25 4.3 Electrical supply 25 4.3.1 General .25 4.4 Physical environment and operating conditions 25 4.4.1 General .25 4.4.2 Electromagnetic compatibility (EMC) 26 4.4.3 Contaminants 27 4.4.4 Ionizing and non-ionizing radiation .27 4.4.5 Vibration, shock, and bump27 4.5 Tr
28、ansportation and storage27 4.6 Provisions for handling 27 4.7 Installation.27 5 Incoming supply conductor terminations and devices for disconnecting and switching off .27 5.1 Incoming supply conductor terminations.27 5.2 Terminal for connection to the external protective earthing system .28 5.3 Supp
29、ly disconnecting (isolating) device 28 5.3.1 General .28 5.3.2 Type28 5.3.3 Requirements 29 5.3.4 Operating means .29 5.3.5 Supply disconnecting device mounting .30 5.3.6 Supply disconnecting device door interlock.30 5.3.7 UPS disconnection.30 5.4 Additional disconnecting devices30 5.5 Protection ag
30、ainst unauthorized, inadvertent and/or mistaken connection of plug/socket combination 31 6 Protection against electric shock.31 6.1 General .31 6.2 Protection against direct contact 31 6.2.1 General .31 6.2.2 Protection by enclosures31 6.2.3 Protection by insulation of live parts .32 6.2.4 Protectio
31、n against residual voltages .32 6.3 Protection against indirect contact .33 6.3.1 General .33 6.3.2 Prevention of the occurrence of a touch voltage .33 6.3.3 Protection by automatic disconnection of supply.33 6.4 Protection by the use of PELV34 6.4.1 General requirements 34 Licensed Copy: London Sou
32、th Bank University, London South Bank University, Tue Jul 03 01:06:32 GMT+00:00 2007, Uncontrolled Copy, (c) BSI 60204-33/Ed.1 CDV IEC 3 6.4.2 Sources for PELV 35 6.4.3 Design to minimise risks of live working .35 6.5 Protection of skilled persons and instructed persons against inadvertent contact w
33、ith hazardous-live-parts.35 6.5.1 General .35 6.5.2 Obstacles 35 6.5.3 Probe holes .35 7 Protection of equipment 35 7.1 General .35 7.2 Overcurrent protection.36 7.2.1 General .36 7.2.2 Supply conductors .36 7.2.3 Neutral conductor protection 36 7.2.4 Socket outlets and their associated conductors 3
34、6 7.2.5 Lighting circuits36 7.2.6 Transformers.36 7.2.7 Location of overcurrent protective devices37 7.2.8 Overcurrent protective devices.37 7.2.9 Rating and setting of overcurrent protective devices.37 7.3 Protection of motors against overheating .38 7.3.1 General .38 7.3.2 Overload protection39 7.
35、3.3 Over-temperature protection 39 7.3.4 Current limiting protection 39 7.4 Abnormal temperature protection.39 7.5 Protection against supply interruption or voltage reduction and subsequent restoration.40 7.6 Motor overspeed protection40 7.7 Earth fault/residual current protection.40 7.8 Phase seque
36、nce protection40 7.9 Protection against overvoltages due to lightning and to switching surges40 7.10 Electrolytic capacitors41 8 Equipotential bonding .41 8.1 General .41 8.2 Protective bonding circuit.43 8.2.1 General .43 8.2.2 Protective conductors 43 8.2.3 Continuity of the protective bonding cir
37、cuit .43 8.2.4 Exclusion of switching devices from the protective bonding circuit 44 8.2.5 Parts that need not be connected to the protective bonding circuit44 8.2.6 Protective conductor connecting points 45 8.2.7 Mobile machines45 8.2.8 Additional protective bonding requirements for electrical equi
38、pment having earth leakage currents higher than 10 mA AC or DC45 8.3 Functional bonding 46 8.4 Measures to limit the effects of high leakage current46 9 Control circuits, emergency off (EMO), and protective interlock circuits .46 9.1 Control circuits 46 9.1.1 Control circuit supply .46 9.1.2 DC circ
39、uits derived from an AC supply .46 Licensed Copy: London South Bank University, London South Bank University, Tue Jul 03 01:06:32 GMT+00:00 2007, Uncontrolled Copy, (c) BSI 60204-33/Ed.1 CDV IEC 4 9.1.3 Start functions .46 9.1.4 Stop functions46 9.1.5 Operating modes .47 9.1.6 Suspension of safety f
40、unctions and/or protective measures 47 9.2 Emergency Off (EMO) .47 9.2.1 General .47 9.2.2 Circuits to be de-energized 48 9.2.3 Requirements for EMO circuits.48 9.3 Operations other than emergency off .48 9.3.1 General .48 9.3.2 Start 48 9.3.3 Stop.49 9.3.4 Other control functions.49 9.3.5 Cableless
41、 control .50 9.4 Protective interlock circuits 50 9.4.1 General .50 9.4.2 Protective interlock circuit design.50 9.5 Multiple control stations .51 10 Operator interface and sensing devices mounted on the fabrication equipment52 10.1 General .52 10.1.1 General device requirements .52 10.1.2 Location
42、and mounting.52 10.1.3 Protection52 10.1.4 Portable and pendant control stations 52 10.2 Push-buttons .53 10.2.1 Colours53 10.2.2 Markings53 10.3 Indicator lights and displays.54 10.3.1 General .54 10.3.2 Colours54 10.3.3 Flashing lights and displays .55 10.4 Illuminated push-buttons55 10.5 Rotary c
43、ontrol devices .55 10.6 Start devices .55 10.7 Emergency off devices.55 10.8 Emergency stop devices 56 10.9 Enabling control device56 11 Controlgear: location, mounting, and enclosures .56 11.1 General requirements 56 11.2 Location and mounting.56 11.2.1 Accessibility and maintenance56 11.2.2 Physic
44、al separation or grouping .57 11.2.3 Heating effects 57 11.3 Degrees of protection 57 11.4 Enclosures, doors and openings 58 12 Conductors and cables .59 12.1 General requirements 59 12.2 Conductors59 12.3 Insulation.59 Licensed Copy: London South Bank University, London South Bank University, Tue J
45、ul 03 01:06:32 GMT+00:00 2007, Uncontrolled Copy, (c) BSI 60204-33/Ed.1 CDV IEC 5 12.4 Current-carrying capacity in normal service60 12.5 Conductor and cable voltage drop60 12.6 Flexible cables.60 12.6.1 General .60 12.6.2 Mechanical rating.60 13 Wiring practices61 13.1 Connections and routing 61 13
46、.1.1 General requirements 61 13.1.2 Conductor and cable runs 61 13.1.3 Conductors of different circuits.62 13.1.4 Conductors smaller than 50 mm2.62 13.1.5 Temperature exposure of conductors .62 13.1.6 Terminal temperatures.62 13.2 Multi-outlet assemblies 62 13.3 Plug/socket combinations 62 13.4 Iden
47、tification of conductors 63 13.4.1 General requirements 63 13.4.2 Identification of the protective conductor 63 13.4.3 Identification of the neutral conductor.63 13.4.4 Identification by colour .63 13.4.5 Wiring inside enclosures64 13.5 Wiring outside enclosures64 13.5.1 General requirements 64 13.5
48、.2 Plug/socket combinations external to electrical enclosures.64 13.5.3 Cables and conductors external to the electrical enclosure.65 13.5.4 Ducts.65 13.5.5 Pendant control stations.65 13.5.6 Strain relief65 13.5.7 Protection of flexible cables .65 13.5.8 Clearance between cables and moving parts66
49、13.5.9 Clearance between flexible conduit and moving parts.66 13.5.10 Interconnection of electrical equipment 66 13.5.11 Dismantling for shipment66 13.6 Ducts, connection boxes and other boxes 66 13.6.1 Cable trunking systems67 13.6.2 Fabrication equipment compartments and cable trunking systems 67 13.6.3 Connection boxes and other boxes.67 14 Electric motors and associated equipment 67 14.1 Gener