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1、a Date: 25 September 2008 Origin: International Latest date for receipt of comments: 31 December 2008 Project no.: 2008/03020 Responsible committee: LBI/30 Cleanroom technology Interested committees: Title: Draft BS ENISO 14644-9 Cleanrooms and associated controlled environments Part 9: Classificati
2、on of surface particle cleanliness Supersession information: If this document is published as a standard, the UK implementation of it will supersede NONE and partially supersede. NONE If you are aware of a current national standard which may be affected, please notify the secretary (contact details
3、below). WARNING: THIS IS A DRAFT AND MUST NOT BE REGARDED OR USED AS A BRITISH STANDARD. THIS DRAFT IS NOT CURRENT BEYOND 31 December 2008. This draft is issued to allow comments from interested parties; all comments will be given consideration prior to publication. No acknowledgement will normally
4、be sent. See overleaf for information on commenting. No copying is allowed, in any form, without prior written permission from BSI except as permitted under the Copyright, Designs and Patent Act 1988 or for circulation within a nominating organization for briefing purposes. Electronic circulation is
5、 limited to dissemination by e-mail within such an organization by committee members. Further copies of this draft may be purchased from BSI Customer Services, Tel: +44(0) 20 8996 9001 or email . British, International and foreign standards are also available from BSI Customer Services. Information
6、on the co-operating organizations represented on the committees referenced above may be obtained from the responsible committee secretary. Cross-references The British Standards which implement International or European publications referred to in this draft may be found via the British Standards On
7、line Service on the BSI web site http:/. Direct tel: Responsible Committee Secretary: Mr B Sheridan (BSI) E-mail: Draft for Public Comment Head Office 389 Chiswick High Road London W4 4AL Telephone: +44(0)20 8996 9000 Fax: +44(0)20 8996 7001 Form 36 Version 8.0 DPC: 08/30190157 DC Licensed Copy: Lo
8、ndon South Bank University, South Bank University, 16/11/2008 12:15, Uncontrolled Copy, (c) BSI b Introduction This draft standard is based on international discussions in which the UK has taken an active part. Your comments on this draft are invited and will assist in the preparation of the consequ
9、ent standard. Comments submitted will be reviewed by the relevant BSI committee before sending the consensus UK vote and comments to the international secretariat, which will then decide appropriate action on the draft and the comments received. If the international standard is approved, it is possi
10、ble the text will be published as an identical British Standard. UK Vote Please indicate whether you consider the UK should submit a negative (with reasons) or positive vote on this draft. Submission The guidance given below is intended to ensure that all comments receive efficient and appropriate a
11、ttention by the responsible BSI committee. Annotated drafts are not acceptable and will be rejected. All comments must be submitted, preferably electronically, to the Responsible Committee Secretary at the address given on the front cover. Comments should be compatible with Version 6.0 or Version 97
12、 of Microsoft Word for Windows, if possible; otherwise comments in ASCII text format are acceptable. Any comments not submitted electronically should still adhere to these format requirements. All comments submitted should be presented as given in the example below. Further information on submitting
13、 comments and how to obtain a blank electronic version of a comment form are available from the BSI web site at: http:/ Template for comments and secretariat observations Date: xx/xx/200x Document: ISO/DIS xxxxx 1 2 (3) 4 5 (6) (7) MB Clause No./ Subclause No./ Annex (e.g. 3.1) Paragraph/ Figure/Tab
14、le/ Note (e.g. Table 1) Type of com- ment Comment (justification for change) by the MB Proposed change by the MB Secretariat observations on each comment submitted 3.1 Definition 1 ed Definition is ambiguous and needs clarifying. Amend to read . so that the mains connector to which no connection . 6
15、.4 Paragraph 2 te The use of the UV photometer as an alternative cannot be supported as serious problems have been encountered in its use in the UK. Delete reference to UV photometer. Microsoft and MS-DOS are registered trademarks, and Windows is a trademark of Microsoft Corporation. Licensed Copy:
16、London South Bank University, South Bank University, 16/11/2008 12:15, Uncontrolled Copy, (c) BSI EUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM DRAFT prEN ISO 14644-9 July 2008 ICS 13.040.35 English Version Cleanrooms and associated controlled environments - Part 9: Classification of surface par
17、ticle cleanliness (ISO/DIS 14644- 9:2008) Salles propres et environnements matriss apparents - Partie 9: Classification de la propret particulaire des surfaces (ISO/DIS 14644-9:2008) Reinrume un d zugehrige Reinraumbereiche-Teil 9: Klassifikation der Reinheit der Oberflche von Partikeln (ISO/DIS 146
18、44-9:2008) This draft European Standard is submitted to CEN members for parallel enquiry. It has been drawn up by the Technical Committee CEN/TC 243. If this draft becomes a European Standard, CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions fo
19、r giving this European Standard the status of a national standard without any alteration. This draft European Standard was established by CEN in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CEN member into its ow
20、n language and notified to the CEN Management Centre has the same status as the official versions. CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithua
21、nia, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom. Recipients of this draft are invited to submit, with their comments, notification of any relevant patent rights of which they are aware and to provide supporting
22、 documentation. Warning : This document is not a European Standard. It is distributed for review and comments. It is subject to change without notice and shall not be referred to as a European Standard. EUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORM
23、UNG Management Centre: rue de Stassart, 36 B-1050 Brussels 2008 CENAll rights of exploitation in any form and by any means reserved worldwide for CEN national Members. Ref. No. prEN ISO 14644-9:2008: E Licensed Copy: London South Bank University, South Bank University, 16/11/2008 12:15, Uncontrolled
24、 Copy, (c) BSI prEN ISO 14644-9:2008 (E) 2 Contents Page Foreword3 Licensed Copy: London South Bank University, South Bank University, 16/11/2008 12:15, Uncontrolled Copy, (c) BSI prEN ISO 14644-9:2008 (E) 3 Foreword This document (prEN ISO 14644-9:2008) has been prepared by Technical Committee ISO/
25、TC 209 “Cleanrooms and associated controlled environments“ in collaboration with Technical Committee CEN/TC 243 “Cleanroom technology” the secretariat of which is held by BSI. This document is currently submitted to the parallel Enquiry. Endorsement notice The text of ISO/DIS 14644-9:2008 has been a
26、pproved by CEN as a prEN ISO 14644-9:2008 without any modification. Licensed Copy: London South Bank University, South Bank University, 16/11/2008 12:15, Uncontrolled Copy, (c) BSI THIS DOCUMENT IS A DRAFT CIRCULATED FOR COMMENT AND APPROVAL. IT IS THEREFORE SUBJECT TO CHANGE AND MAY NOT BE REFERRED
27、 TO AS AN INTERNATIONAL STANDARD UNTIL PUBLISHED AS SUCH. IN ADDITION TO THEIR EVALUATION AS BEING ACCEPTABLE FOR INDUSTRIAL, TECHNOLOGICAL, COMMERCIAL AND USER PURPOSES, DRAFT INTERNATIONAL STANDARDS MAY ON OCCASION HAVE TO BE CONSIDERED IN THE LIGHT OF THEIR POTENTIAL TO BECOME STANDARDS TO WHICH
28、REFERENCE MAY BE MADE IN NATIONAL REGULATIONS. RECIPIENTS OF THIS DRAFT ARE INVITED TO SUBMIT, WITH THEIR COMMENTS, NOTIFICATION OF ANY RELEVANT PATENT RIGHTS OF WHICH THEY ARE AWARE AND TO PROVIDE SUPPORTING DOCUMENTATION. DRAFT INTERNATIONAL STANDARD ISO/DIS 14644-9 International Organization for
29、Standardization, 2008 INTERNATIONAL ORGANIZATION FOR STANDARDIZATION ORGANISATION INTERNATIONALE DE NORMALISATION ISO/TC 209 Voting begins on: 2008-07-31 Secretariat: ANSI Voting terminates on: 2008-12-31 Cleanrooms and associated controlled environments Part 9: Classification of surface particle cl
30、eanliness Salles propres et environnements matriss apparents Partie 9: Classification de la propret particulaire des surfaces ICS 13.040.35 ISO/CEN PARALLEL ENQUIRY The CEN Secretary-General has advised the ISO Secretary-General that this ISO/DIS covers a subject of interest to European standardizat
31、ion. In accordance with the ISO-lead mode of collaboration as defined in the Vienna Agreement, consultation on this ISO/DIS has the same effect for CEN members as would a CEN enquiry on a draft European Standard. Should this draft be accepted, a final draft, established on the basis of comments rece
32、ived, will be submitted to a parallel two-month FDIS vote in ISO and formal vote in CEN. In accordance with the provisions of Council Resolution 15/1993 this document is circulated in the English language only. Conformment aux dispositions de la Rsolution du Conseil 15/1993, ce document est distribu
33、 en version anglaise seulement. To expedite distribution, this document is circulated as received from the committee secretariat. ISO Central Secretariat work of editing and text composition will be undertaken at publication stage. Pour acclrer la distribution, le prsent document est distribu tel qu
34、il est parvenu du secrtariat du comit. Le travail de rdaction et de composition de texte sera effectu au Secrtariat central de lISO au stade de publication. Licensed Copy: London South Bank University, South Bank University, 16/11/2008 12:15, Uncontrolled Copy, (c) BSI ISO/DIS 14644-9 ii ISO 2008 Al
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38、iven below. Copyright notice This ISO document is a Draft International Standard and is copyright-protected by ISO. Except as permitted under the applicable laws of the users country, neither this ISO draft nor any extract from it may be reproduced, stored in a retrieval system or transmitted in any
39、 form or by any means, electronic, photocopying, recording or otherwise, without prior written permission being secured. Requests for permission to reproduce should be addressed to either ISO at the address below or ISOs member body in the country of the requester. ISO copyright office Case postale
40、56 CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 41 22 749 09 47 E-mail copyrightiso.org Web www.iso.org Reproduction may be subject to royalty payments or a licensing agreement. Violators may be prosecuted. Licensed Copy: London South Bank University, South Bank University, 16/11/2008 12:15, Uncon
41、trolled Copy, (c) BSI ISO/DIS 14644-9 ISO 2008 All rights reserved iii Contents Page Foreword iv Introduction.v 1 Scope1 2 Normative references1 3 Terms and definitions.2 4 Abbreviated terms.3 5 Classification system3 5.1 General .3 5.2 ISO-SPC classification format4 5.3 Designation6 5.4 General inf
42、ormation on surface particle cleanliness.7 6 Demonstration of compliance7 6.1 Principle7 6.2 Testing7 6.3 Test report8 Annex A (informative) Descriptor for specific particle size ranges.9 A.1 Application.9 A.2 Surface descriptor for specific particle size ranges9 Annex B (informative) Parameters inf
43、luencing the SPC classification.12 B.1 Background12 B.2 Parameters.13 B.2.1 Physical/chemical properties.13 B.2.2 Shape of the surface and particles13 B.2.3 Ability to measure/analyse and appropriate statistics for particle analysis.13 B.2.4 Particle origin.14 B.2.5 Appropriate statistics for the pa
44、rticle analysis14 B.2.6 Physical/chemical properties.14 Annex C (informative) Surface characteristics16 C.1 Surface description.16 C.2 Surface characteristics.16 C.2.1 Roughness.16 C.2.2 Porosity 16 C.2.3 Hardness 17 C.2.4 Static electricity.17 C.2.5 Superficial tension 18 Annex D (informative) Meas
45、urement methods for testing surface particle cleanliness19 D.1 Surface particle cleanliness.19 D.2 Criteria for the measurement of surface particle cleanliness.19 D.2.1 Requirements of the measurement method.19 D.2.2 Measurement methods .20 D.2.3 Determination of number of samples23 D.2.4 Packaging
46、of test samples .23 D.2.5 Measurement technique .24 D.3 Documentation of surface particle cleanliness26 Bibliography28 Licensed Copy: London South Bank University, South Bank University, 16/11/2008 12:15, Uncontrolled Copy, (c) BSI ISO/DIS 14644-9 iv ISO 2008 All rights reserved Foreword ISO (the In
47、ternational Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee h
48、as been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical
49、 standardization. International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2. The main task of technical committees is to prepare International Standards. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standar