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1、BRITISH STANDARD BS EN ISO 13695:2004 Optics and photonics Lasers and laser related equipment Test methods for the spectral characteristics of lasers The European Standard EN ISO 13695:2004 has the status of a British Standard ICS 31.260 ? Licensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 02:03
2、:55 GMT+00:00 2006, Uncontrolled Copy, (c) BSI BS EN ISO 13695:2004 This British Standard was published under the authority of the Standards Policy and Strategy Committee on 16 July 2004 BSI 16 July 2004 ISBN 0 580 44068 0 National foreword This British Standard is the official English language vers
3、ion of EN ISO 13695:2004. It is identical with ISO 13695:2004. The UK participation in its preparation was entrusted to Technical Committee CPW/172, Optics and optical instruments, which has the responsibility to: A list of organizations represented on this committee can be obtained on request to it
4、s secretary. Cross-references The British Standards which implement international or European publications referred to in this document may be found in the BSI Catalogue under the section entitled “International Standards Correspondence Index”, or by using the “Search” facility of the BSI Electronic
5、 Catalogue or of British Standards Online. This publication does not purport to include all the necessary provisions of a contract. Users are responsible for its correct application. Compliance with a British Standard does not of itself confer immunity from legal obligations. aid enquirers to unders
6、tand the text; present to the responsible international/European committee any enquiries on the interpretation, or proposals for change, and keep the UK interests informed; monitor related international and European developments and promulgate them in the UK. Summary of pages This document comprises
7、 a front cover, an inside front cover, the EN ISO title page, the EN ISO foreword page, the ISO title page, pages ii to v, a blank page, pages 1 to 25 and a back cover. The BSI copyright notice displayed in this document indicates when the document was last issued. Amendments issued since publicatio
8、n Amd. No. DateComments Licensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 02:03:55 GMT+00:00 2006, Uncontrolled Copy, (c) BSI EUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN ISO 13695 June 2004 ICS 31.260 English version Optics and photonics - Lasers and laser-related equipment - Test meth
9、ods for the spectral characteristics of lasers (ISO 13695:2004) Optique et photonique - Lasers et quipement associ aux lasers - Mthodes dessai des caractristiques spectrales des lasers (ISO 13695:2004) This European Standard was approved by CEN on 23 April 2004. CEN members are bound to comply with
10、the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the Central Secretariat
11、 or to any CEN member. This European Standard exists in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CEN member into its own language and notified to the Central Secretariat has the same status as the official ve
12、rsions. CEN members are the national standards bodies of Austria, Belgium, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Slovakia, Slovenia, Spain, Sweden, Swi
13、tzerland and United Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORMUNG Management Centre: rue de Stassart, 36 B-1050 Brussels 2004 CENAll rights of exploitation in any form and by any means reserved worldwide for CEN national Members. Ref. N
14、o. EN ISO 13695:2004: E Licensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 02:03:55 GMT+00:00 2006, Uncontrolled Copy, (c) BSI Foreword This document (EN ISO 13695:2004) has been prepared by Technical Committee ISO/TC 172 “Optics and optical instruments“ in collaboration with Technical Committee
15、 CEN/TC 123 “Lasers and laser-related equipment“, the secretariat of which is held by DIN. This European Standard shall be given the status of a national standard, either by publication of an identical text or by endorsement, at the latest by December 2004, and conflicting national standards shall b
16、e withdrawn at the latest by December 2004. According to the CEN/CENELEC Internal Regulations, the national standards organizations of the following countries are bound to implement this European Standard: Austria, Belgium, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece,
17、Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom. Endorsement notice The text of ISO 13695:2004 has been approved by CEN as EN ISO 13695:2004 without any modifications. EN
18、ISO 13695:2004 Licensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 02:03:55 GMT+00:00 2006, Uncontrolled Copy, (c) BSI Reference number ISO 13695:2004(E) INTERNATIONAL STANDARD ISO 13695 First edition 2004-06-01 Optics and photonics Lasers and laser-related equipment Test methods for the spectral
19、 characteristics of lasers Optique et photonique Lasers et quipement associ aux lasers Mthodes dessai des caractristiques spectrales des lasers EN ISO 13695:2004 Licensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 02:03:55 GMT+00:00 2006, Uncontrolled Copy, (c) BSI IS:59631 O4002(E) DPlcsid Fremi
20、a ihTs PDF file may ctnoian emdebt dedyfepcaes. In ccaocnadrw eith Aebods licensilop gnic,y this file mairp eb ynted iv roweb detu slahl ton ide ebtlnu deess the typefaces whice era hml era deddebicsnede to i dnanstlaled t noeh computfrep reormign tide ehtin.g In wodlnidaot gnhis file, trapise atpec
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22、le; tP ehDc-Frtaeion marapterew setpo erimizde for irpnti.gn Evyre caer neeb sah taken to sneeru that the file is suitlbae fosu re yb ISO memdob rebeis. In tlnu ehikletneve y ttah lborp aem leratit gno it is f,dnuo plsaee inform ttneC ehlar Secrteiraat ta the serddaig sleb nevwo. ii EN ISO 13695:200
23、4 Licensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 02:03:55 GMT+00:00 2006, Uncontrolled Copy, (c) BSI iii Contents Page Forewordiv Introduction v 1 Scope1 2 Normative references .1 3 Terms and definitions.1 4 Symbols and abbreviated terms8 5 Traceability 9 6 Measurement of wavelength and band
24、width .9 6.1 General.9 6.2 Types of measurements.10 6.3 Equipment selection.11 6.4 Measurements in air .11 6.5 Measurements at low resolution .12 6.6 Measurement at higher resolution 14 7 Measurement of wavelength stability.17 7.1 Dependence of the wavelength on operating conditions.17 7.2 Wavelengt
25、h stability of a single frequency laser.17 8 Test report18 Annex A (informative) Refractive index of air20 Annex B (informative) Criteria for the choice of a grating monochromator and its accessories Calibration.21 Annex C (informative) Criteria for the choice of a Fabry-Perot interferometer24 Bibli
26、ography .25 EN ISO 13695:2004 Licensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 02:03:55 GMT+00:00 2006, Uncontrolled Copy, (c) BSI iv Foreword ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of prepar
27、ing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in li
28、aison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2. The main task of
29、 technical committees is to prepare International Standards. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote. Attention is
30、 drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. ISO 13695 was prepared by Technical Committee ISO/TC 172, Optics and photonics, Subcommittee SC 9, Electro-optica
31、l systems. EN ISO 13695:2004 Licensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 02:03:55 GMT+00:00 2006, Uncontrolled Copy, (c) BSI v Introduction The spectral characteristics of a laser, such as its peak wavelength or spectral linewidth, are important for potential applications. Examples are th
32、e specific application requirements of interferometry and lithography. This International Standard gives definitions of key parameters describing the spectral characteristics of a laser, and provides guidance on performing measurements to determine these parameters for common laser types. The accept
33、able level of uncertainty in the measurement of wavelength will vary according to the intended application. Therefore, equipment selection and measurement and evaluation procedures are outlined for three accuracy classes. To standardize reporting of spectral characteristics measurement results, a re
34、port example is also included. EN ISO 13695:2004 Licensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 02:03:55 GMT+00:00 2006, Uncontrolled Copy, (c) BSI EN ISO 13695:2004 Licensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 02:03:55 GMT+00:00 2006, Uncontrolled Copy, (c) BSI INTENRATIONAL TSAND
35、ADR IS:59631 O4002(E) I SO 4002 All irthgs ersedevr 1 Optics and photonics Lasers and laser-related equipment Test methods for the spectral characteristics of lasers 1 Scope This International Standard specifies methods by which the spectral characteristics such as wavelength, bandwidth, spectral di
36、stribution and wavelength stability of a laser beam can be measured. This International Standard is applicable to both continuous wave (cw) and pulsed laser beams. The dependence of the spectral characteristics of a laser on its operating conditions may also be important. 2 Normative references The
37、following referenced documents are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies. ISO 11145, Optics and optical instruments Lasers and
38、laser-related equipment Vocabulary and symbols ISO 12005, Lasers and laser-related equipment Test methods for laser beam parameters Polarization IEC 60747-5-1, Discrete semiconductor devices and integrated circuits Part 5-1: Optoelectronic devices General Guide to the expression of uncertainty in me
39、asurement (GUM), BIPM 1), IEC, IFCC 2), ISO, IUPAC 3), IUPAP 4), OIML 5), 1993, corrected and reprinted in 1995 International vocabulary of basic and general terms in metrology (VIM). BIPM, IEC, IFCC, ISO, IUPAC, IUPAP, OIML, Geneva, ISO 3 Terms and definitions For the purposes of this document, the
40、 terms and definitions given in the VIM, ISO 11145 and IEC 60747-5-1, and the following apply. 3.1 wavelength in vacuum 0 wavelength of an infinite, plane electromagnetic wave propagating in vacuum NOTE For a wave of frequency f, the wavelength in vacuum is then given by 0 = c/f, where c = 299 792 4
41、58 m/s. 1) International Bureau of Weights and Measures (Bureau International des Poids et Measures). 2) International Federation of Clinical Chemistry and Laboratory Medicine. 3) International Union of Pure and Applied Chemistry. 4) International Union of Pure and Applied Physics. 5) International
42、Organization of Legal Metrology (Organization International de Metrologie Legale). EN ISO 13695:2004 1 Licensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 02:03:55 GMT+00:00 2006, Uncontrolled Copy, (c) BSI IS:59631 O4002(E) 2 I SO 4002 All irthgs ersedevr 3.2 wavelength in air air wavelength of
43、radiation propagating in the air and related to the wavelength in vacuum by the relationship: air = 0 / nair where nair denotes the refractive index of ambient air (see 6.4) NOTE The specific properties of the ambient atmosphere, such as humidity, pressure, temperature and composition all influence
44、nair. Therefore it is better to report the wavelength in vacuum, or the wavelength in standard air. These can be calculated from air and nair using the equation given in 6.4. 3.3 wavelength in dry air under standard conditions std wavelength of radiation propagating in dry air (0 % humidity) under s
45、tandard conditions and related to the wavelength in vacuum 0 by the relationship: std = 0 / nstd where nstd denotes the refractive index of air under standard conditions (see 6.4). NOTE For the purpose of this International Standard, air under standard conditions is as defined in 6.4. Note that vari
46、ous other “standard conditions” have been reported in the literature. It is therefore necessary to quote the conditions in the test report. 3.4 spectral radiant power energy distribution P (), Q () ratio of the radiant power dP() or energy dQ() in the case of a pulsed laser transferred by laser beam
47、 in the range of wavelength d to that range ( ) ( )d d P P = ( ) ( )d d Q Q = NOTE The radiant power (energy) delivered by the laser beam in any bandwidth low to high is then given by the integral: highhigh lowlow ( ) d( ) dPPQQ = 3.5 peak-emission wavelength p wavelength at which the spectral radia
48、nt power (energy) distribution has its maximum value See Figure 1. EN ISO 13695:2004 2 Licensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 02:03:55 GMT+00:00 2006, Uncontrolled Copy, (c) BSI IS:59631 O4002(E) I SO 4002 All irthgs ersedevr 3 3.6 weighted average wavelength (first moment) g wavelen
49、gth representing the centre of gravity of the spectral radiant power (energy) distribution, as defined by: max min max min g ( ) d ( ) d S S = where S() is the spectral radiant power P() in the case of a cw laser, or the spectral radiant energy distribution Q() in the case of a pulsed laser See Figure 1. NOTE For choosing of the integration limits