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1、SPCIFICATION TECHNIQUE CEI IEC TECHNICAL SPECIFICATION TS 61945 Premire dition First edition 2000-03 Circuits intgrs Agrment dune ligne de fabrication Mthodologie danalyse technologique et de dfaillance Integrated circuits Manufacturing line approval Methodology for technology and failure analysis N
2、umro de rfrence Reference number IEC/TS 61945:2000 Copyright International Electrotechnical Commission Provided by IHS under license with IECLicensee=IHS Employees/1111111001, User=Wing, Bernie Not for Resale, 03/09/2007 07:49:11 MSTNo reproduction or networking permitted without license from IHS -,
3、-,- Numros des publications Depuis le 1er janvier 1997, les publications de la CEI sont numrotes partir de 60000. Publications consolides Les versions consolides de certaines publications de la CEI incorporant les amendements sont disponibles. Par exemple, les numros ddition 1.0, 1.1 et 1.2 indiquen
4、t respectivement la publication de base, la publication de base incorporant lamendement 1, et la publication de base incorporant les amendements 1 et 2. Validit de la prsente publication Le contenu technique des publications de la CEI est constamment revu par la CEI afin quil reflte ltat actuel de l
5、a technique. Des renseignements relatifs la date de reconfir- mation de la publication sont disponibles dans le Catalogue de la CEI. Les renseignements relatifs des questions ltude et des travaux en cours entrepris par le comit technique qui a tabli cette publication, ainsi que la liste des publicat
6、ions tablies, se trouvent dans les documents ci- dessous: Site web de la CEI* Catalogue des publications de la CEI Publi annuellement et mis jour rgulirement (Catalogue en ligne)* Bulletin de la CEI Disponible la fois au site web de la CEI* et comme priodique imprim Terminologie, symboles graphiques
7、 et littraux En ce qui concerne la terminologie gnrale, le lecteur se reportera la CEI 60050: Vocabulaire Electro- technique International (VEI). Pour les symboles graphiques, les symboles littraux et les signes dusage gnral approuvs par la CEI, le lecteur consultera la CEI 60027: Symboles littraux
8、utiliser en lectrotechnique, la CEI 60417: Symboles graphiques utilisables sur le matriel. Index, relev et compilation des feuilles individuelles, et la CEI 60617: Symboles graphiques pour schmas. * Voir adresse site web sur la page de titre. Numbering As from 1 January 1997 all IEC publications are
9、 issued with a designation in the 60000 series. Consolidated publications Consolidated versions of some IEC publications including amendments are available. For example, edition numbers 1.0, 1.1 and 1.2 refer, respectively, to the base publication, the base publication incor- porating amendment 1 an
10、d the base publication incorporating amendments 1 and 2. Validity of this publication The technical content of IEC publications is kept under constant review by the IEC, thus ensuring that the content reflects current technology. Information relating to the date of the reconfirmation of the publicat
11、ion is available in the IEC catalogue. Information on the subjects under consideration and work in progress undertaken by the technical committee which has prepared this publication, as well as the list of publications issued, is to be found at the following IEC sources: IEC web site* Catalogue of I
12、EC publications Published yearly with regular updates (On-line catalogue)* IEC Bulletin Available both at the IEC web site* and as a printed periodical Terminology, graphical and letter symbols For general terminology, readers are referred to IEC 60050: International Electrotechnical Vocabulary (IEV
13、). For graphical symbols, and letter symbols and signs approved by the IEC for general use, readers are referred to publications IEC 60027: Letter symbols to be used in electrical technology, IEC 60417: Graphical symbols for use on equipment. Index, survey and compilation of the single sheets and IE
14、C 60617: Graphical symbols for diagrams. * See web site address on title page. Copyright International Electrotechnical Commission Provided by IHS under license with IECLicensee=IHS Employees/1111111001, User=Wing, Bernie Not for Resale, 03/09/2007 07:49:11 MSTNo reproduction or networking permitted
15、 without license from IHS -,-,- SPCIFICATION TECHNIQUE CEI IEC TECHNICAL SPECIFICATION TS 61945 Premire dition First edition 2000-03 Circuits intgrs Agrment dune ligne de fabrication Mthodologie danalyse technologique et de dfaillance Integrated circuits Manufacturing line approval Methodology for t
16、echnology and failure analysis Commission Electrotechnique Internationale International Electrotechnical Commission Pour prix, voir catalogue en vigueur For price, see current catalogue IEC 2000 Droits de reproduction rservs Copyright - all rights reserved Aucune partie de cette publication ne peut
17、tre reproduite ni utilise sous quelque forme que ce soit et par aucun procd, lectronique ou mcanique, y compris la photocopie et les microfilms, sans laccord crit de lditeur. No part of this publication may be reproduced or utilized in any form or by any means, electronic or mechanical, including ph
18、otocopying and microfilm, without permission in writing from the publisher. International Electrotechnical Commission3, rue de Varemb Geneva, Switzerland Telefax: +41 22 919 0300e-mail: inmailiec.ch IEC web site http:/www.iec.ch CODE PRIX PRICE CODEL Copyright International Electrotechnical Commissi
19、on Provided by IHS under license with IECLicensee=IHS Employees/1111111001, User=Wing, Bernie Not for Resale, 03/09/2007 07:49:11 MSTNo reproduction or networking permitted without license from IHS -,-,- 2 TS 61945 CEI:2000 SOMMAIRE Pages AVANT-PROPOS . 4 Clause 1Domaine dapplication et objet . 8 2R
20、frences normatives 10 3Terminologie 10 4Types danalyse technologique 10 4.1Premier degr: Examen visuel gnral (essai AT1). 12 4.2Second degr: Examen visuel approfondi (essai AT2). 14 4.3Troisime degr: Examen dtaill au MEB sous fort grossissement (essai AT3) . 14 4.4Quatrime degr: Analyse de construct
21、ion (essai AT4). 16 4.5Cinquime degr: Essais complmentaires (essai AT5) 18 5Analyse de dfaillance (essai AT6) 20 5.1But 20 5.2Moyens. 20 5.3Description . 20 Copyright International Electrotechnical Commission Provided by IHS under license with IECLicensee=IHS Employees/1111111001, User=Wing, Bernie
22、Not for Resale, 03/09/2007 07:49:11 MSTNo reproduction or networking permitted without license from IHS -,-,- TS 61945 IEC:2000 3 CONTENTS Page FOREWORD 5 Clause 1Scope and object . 9 2Normative references. 11 3Terms 11 4Classification of technology analysis 11 4.1First level: General visual inspect
23、ion (AT1 test) 13 4.2Second level: Detailed visual inspection (AT2 test). 15 4.3Third level: Scanning Electron Microscope examination under large magnification (AT3 test) . 15 4.4Fourth level: Construction analysis (AT4 test). 17 4.5Fifth level: Complementary tests (AT5 test). 19 5Failure analysis (
24、AT6 test) . 21 5.1Objective 21 5.2Resources 21 5.3Description . 21 Copyright International Electrotechnical Commission Provided by IHS under license with IECLicensee=IHS Employees/1111111001, User=Wing, Bernie Not for Resale, 03/09/2007 07:49:11 MSTNo reproduction or networking permitted without lic
25、ense from IHS -,-,- 4 TS 61945 CEI:2000 COMMISSION LECTROTECHNIQUE INTERNATIONALE _ CIRCUITS INTGRS AGRMENT DUNE LIGNE DE FABRICATION Mthodologie danalyse technologique et de dfaillance AVANT-PROPOS 1)La CEI (Commission lectrotechnique Internationale) est une organisation mondiale de normalisation c
26、ompose de lensemble des comits lectrotechniques nationaux (Comits nationaux de la CEI). La CEI a pour objet de favoriser la coopration internationale pour toutes les questions de normalisation dans les domaines de llectricit et de llectronique. A cet effet, la CEI, entre autres activits, publie des
27、Normes internationales. Leur laboration est confie des comits dtudes, aux travaux desquels tout Comit national intress par le sujet trait peut participer. Les organisations internationales, gouvernementales et non gouvernementales, en liaison avec la CEI, participent galement aux travaux. La CEI col
28、labore troitement avec lOrganisation Internationale de Normalisation (ISO), selon des conditions fixes par accord entre les deux organisations. 2)Les dcisions ou accords officiels de la CEI concernant les questions techniques reprsentent, dans la mesure du possible, un accord international sur les s
29、ujets tudis, tant donn que les Comits nationaux intresss sont reprsents dans chaque comit dtudes. 3)Les documents produits se prsentent sous la forme de recommandations internationales. Ils sont publis comme normes, spcifications techniques, rapports techniques ou guides et agrs comme tels par les C
30、omits nationaux. 4)Dans le but dencourager lunification internationale, les Comits nationaux de la CEI sengagent appliquer de faon transparente, dans toute la mesure possible, les Normes internationales de la CEI dans leurs normes nationales et rgionales. Toute divergence entre la norme de la CEI et
31、 la norme nationale ou rgionale correspondante doit tre indique en termes clairs dans cette dernire. 5)La CEI na fix aucune procdure concernant le marquage comme indication dapprobation et sa responsabilit nest pas engage quand un matriel est dclar conforme lune de ses normes. 6) Lattention est atti
32、re sur le fait que certains des lments de la prsente spcification technique peuvent faire lobjet de droits de proprit intellectuelle ou de droits analogues. La CEI ne saurait tre tenue pour responsable de ne pas avoir identifi de tels droits de proprit et de ne pas avoir signal leur existence. La tc
33、he principale des comits dtudes de la CEI est llaboration des Normes internationales. Exceptionnellement, un comit dtudes peut proposer la publication dune spcification technique lorsquen dpit de maints efforts, laccord requis ne peut tre ralis en faveur de la publication dune Norme internationale,
34、ou lorsque le sujet en question est encore en cours de dveloppement technique ou quand, pour une raison quelconque, la possibilit dun accord pour la publication dune Norme internationale peut tre envisage pour lavenir mais pas dans limmdiat; Les spcifications techniques font lobjet dun nouvel examen
35、 trois ans au plus tard aprs leur publication afin de dcider ventuellement de leur transformation en Normes internationales. La CEI 61945, qui est une spcification technique, a t tablie par le sous-comit 47A: Circuits intgrs, du comit dtudes 47 de la CEI: Dispositifs semiconducteurs. Le texte de cet
36、te spcification technique est issu des documents suivants: Projet denquteRapport de vote 47A/523/CDV47A/555/RVC Le rapport de vote indiqu dans le tableau ci-dessus donne toute information sur le vote ayant abouti lapprobation de cette spcification technique. Copyright International Electrotechnical
37、Commission Provided by IHS under license with IECLicensee=IHS Employees/1111111001, User=Wing, Bernie Not for Resale, 03/09/2007 07:49:11 MSTNo reproduction or networking permitted without license from IHS -,-,- TS 61945 IEC:2000 5 INTERNATIONAL ELECTROTECHNICAL COMMISSION _ INTEGRATED CIRCUITS MANU
38、FACTURING LINE APPROVAL Methodology for technology and failure analysis FOREWORD 1)The IEC (International Electrotechnical Commission) is a worldwide organization for standardization comprising all national electrotechnical committees (IEC National Committees). The object of the IEC is to promote in
39、ternational co-operation on all questions concerning standardization in the electrical and electronic fields. To this end and in addition to other activities, the IEC publishes International Standards. Their preparation is entrusted to technical committees; any IEC National Committee interested in t
40、he subject dealt with may participate in this preparatory work. International, governmental and non-governmental organizations liaising with the IEC also participate in this preparation. The IEC collaborates closely with the International Organization for Standardization (ISO) in accordance with con
41、ditions determined by agreement between the two organizations. 2)The formal decisions or agreements of the IEC on technical matters express, as nearly as possible, an international consensus of opinion on the relevant subjects since each technical committee has representation from all interested Nat
42、ional Committees. 3)The documents produced have the form of recommendations for international use and are published in the form of standards, technical specifications, technical reports or guides and they are accepted by the National Committees in that sense. 4) In order to promote international uni
43、fication, IEC National Committees undertake to apply IEC International Standards transparently to the maximum extent possible in their national and regional standards. Any divergence between the IEC Standard and the corresponding national or regional standard shall be clearly indicated in the latter
44、. 5) The IEC provides no marking procedure to indicate its approval and cannot be rendered responsible for any equipment declared to be in conformity with one of its standards. 6) Attention is drawn to the possibility that some of the elements of this International Standard may be the subject of pat
45、ent rights. The IEC shall not be held responsible for identifying any or all such patent rights. The main task of IEC technical committees is to prepare International Standards. In exceptional circumstances, a technical committee may propose the publication of a technical specification when the requ
46、ired support cannot be obtained for the publication of an International Standard, despite repeated efforts, or the subject is still under technical development or where, for any other reason, there is the future but no immediate possibility of an agreement on an International Standard. Technical spe
47、cifications are subject to review within three years of publication to decide whether they can be transformed into International Standards. IEC 61945, which is a technical specification, has been prepared by subcommittee 47A: Integrated circuits, of IEC technical committee 47: Semiconductor devices.
48、 The text of this technical specification is based on the following documents: Enquiry draftReport on voting 47A/523/CDV47A/555/RVC Full information on the voting for the approval of this technical specification can be found in the report on voting indicated in the above table. Copyright Internationa