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1、Reference number ISO 16063-11:1999(E) ISO 1999 INTERNATIONAL STANDARD ISO 16063-11 First edition 1999-12-15 Methods for the calibration of vibration and shock transducers Part 11: Primary vibration calibration by laser interferometry Mthodes pour ltalonnage des transducteurs de vibrations et de choc
2、s Partie 11: talonnage primaire de vibrations avec interfromtre de laser ISO 16063-11:1999(E) PDF disclaimer This PDF file may contain embedded typefaces. In accordance with Adobes licensing policy, this file may be printed or viewed but shall not be edited unless the typefaces which are embedded ar
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5、ating to it is found, please inform the Central Secretariat at the address given below. ISO 1999 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying and microfilm, wit
6、hout permission in writing from either ISO at the address below or ISOs member body in the country of the requester. ISO copyright office Case postale 56 ? CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 41 22 734 10 79 E-mail copyrightiso.ch Web www.iso.ch Printed in Switzerland ii ISO 1999 All righ
7、ts reserved -,-,- ISO 16063-11:1999(E) ISO 1999 All rights reservediii ContentsPage Foreword.iv 1Scope 1 2Uncertainty of measurement1 3Requirements for apparatus.2 3.1General2 3.2Frequency generator and indicator .2 3.3Power amplifier/vibrator combination.2 3.4Seismic block(s) for vibrator and laser
8、 interferometer2 3.5Laser .3 3.6Interferometer.3 3.7Counting instrumentation (for Method 1).4 3.8Tunable bandpass filter or spectrum analyser (for Method 2).4 3.9Instrumentation for zero detection (for Method 2).4 3.10Voltage instrumentation, measuring true r.m.s. accelerometer output.4 3.11Distorti
9、on-measuring instrumentation4 3.12Oscilloscope (optional) 4 3.13Waveform recorder with computer interface (for Method 3) 5 3.14Computer with data-processing program (for Method 3) .5 3.15Other requirements5 4Ambient conditions .6 5Preferred accelerations and frequencies6 6Common procedure for all th
10、ree methods6 7Method 1: Fringe-counting method .6 7.1General6 7.2Test procedure.6 7.3Expression of results 8 8Method 2: Minimum-point method.8 8.1General8 8.2Test procedure.9 8.3Expression of results 11 9Method 3: Sine-approximation method.11 9.1General11 9.2Test procedure.11 9.3Data acquisition.13
11、9.4Data processing.14 10Report of calibration results.15 Annex A (normative) Uncertainty components in the primary calibration by laser interferometry of vibration and shock transducers.17 Annex B (normative) Formulae for the calculation of acceleration.23 Bibliography27 -,-,- ISO 16063-11:1999(E) i
12、v ISO 1999 All rights reserved Foreword ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body intere
13、sted in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical
14、Commission (IEC) on all matters of electrotechnical standardization. International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 3. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication
15、 as an International Standard requires approval by at least 75 % of the member bodies casting a vote. Attention is drawn to the possibility that some of the elements of this part of ISO 16063 may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such paten
16、t rights. International Standard ISO 16063-11 was prepared by Technical Committee ISO/TC 108,Mechanical vibration and shock, Subcommittee SC 3,Use and calibration of vibration and shock measuring instruments. This first edition of ISO 16063-11 cancels and replaces ISO 5347-1, which has been technica
17、lly revised. ISO 16063 consists of the following parts, under the general titleMethods for the calibration of vibration and shock transducers: ?Part 1: Basic concepts ?Part 11: Primary vibration calibration by laser interferometry ?Part 12: Primary vibration calibration by the reciprocity method ?Pa
18、rt 13: Primary shock calibration using laser interferometry ?Part 21: Secondary vibration calibration ?Part 22: Secondary shock calibration Annexes A and B form a normative part of this part of ISO 16063. INTERNATIONAL STANDARDISO 16063-11:1999(E) ISO 1999 All rights reserved1 Methods for the calibr
19、ation of vibration and shock transducers Part 11: Primary vibration calibration by laser interferometry 1Scope This part of ISO 16063 specifies the instrumentation and procedure to be used for primary vibration calibration of rectilinear accelerometers (with or without amplifier) to obtain magnitude
20、 and phase lag of the complex sensitivity by steady-state sinusoidal vibration and laser interferometry. It is applicable to a frequency range from 1 Hz to 10 kHz and a dynamic range (amplitude) from 0,1 m/s2to 1 000 m/s2(frequency-dependent). These ranges are covered with the uncertainty of measure
21、ment specified in clause 2. Calibration frequencies lower than 1 Hz (e.g. 0,4 Hz, which is a reference frequency used in other International Standards) and acceleration amplitudes smaller than 0,1 m/s2(e.g. 0,004 m/s2at 1 Hz) can be achieved using Method 3 specified in this part of ISO 16063, in con
22、junction with an appropriate low-frequency vibration generator. Method 1 (fringe-counting method) is applicable to sensitivity magnitude calibration in the frequency range 1 Hz to 800 Hz and, under special conditions, at higher frequencies (cf. clause 7). Method 2 (minimum-point method) can be used
23、for sensitivity magnitude calibration in the frequency range 800 Hz to 10 kHz (cf. clause 8). Method 3 (sine-approximation method) can be used for magnitude of sensitivity and phase calibration in the frequency range 1 Hz to 10 kHz (cf. clause 9). Methods 1 and 3 provide for calibrations at fixed ac
24、celeration amplitudes at various frequencies. Method 2 requires calibrations at fixed displacement amplitudes (acceleration amplitude varies with frequency). 2Uncertainty of measurement The limits of the uncertainty of measurement applicable to this part of ISO 16063 shall be as follows. a)For the m
25、agnitude of sensitivity: 0,5 % of the measured value at reference conditions; u 1 % of the measured value outside reference conditions. b)For the phase shift of sensitivity: 0,5 of the measured value at reference conditions; u 1 of the reading outside reference conditions. Recommended reference cond
26、itions are as follows: ?frequency in hertz: 160, 80, 40, 16 or 8 (or radian frequency ? = 1 000, 500, 250, 100 or 50 radians per second); -,-,- ISO 16063-11:1999(E) 2 ISO 1999 All rights reserved ?acceleration in metres per second squared (acceleration amplitude or r.m.s. value): 100, 50, 20, 10, 5,
27、 2 or 1. Amplifier settings shall be selected for optimum performance with respect to noise, distortion and influence from cut-off frequencies. NOTEThe uncertainty of measurement is expressed as the expanded measurement uncertainty in accordance with ISO 16063-1 (referred to in short as uncertainty)
28、. 3Requirements for apparatus 3.1General This clause gives recommended specifications for the apparatus necessary to fulfil the scope of clause 1 and to obtain the uncertainties of clause 2. If desired, systems covering parts of the ranges may be used, and normally different systems (e.g. exciters)
29、should be used to cover all the frequency and dynamic ranges. NOTEThe apparatus specified in this clause covers all devices and instruments required for any of the three calibration methods described in this part of ISO 16063. The assignment to a given method is indicated (cf. Figures 1, 2 and 3). 3
30、.2Frequency generator and indicator A frequency generator and indicator having the following characteristics shall be used: a)uncertainty of frequency: maximum 0,05 % of reading; b)frequency stability: better than ? 0,05 % of reading over the measurement period; c)amplitude stability: better than ?
31、0,05 % of reading over the measurement period. 3.3Power amplifier/vibrator combination A power amplifier/vibrator combination having the following characteristics shall be used. a)Total harmonic distortion of acceleration: 2 % maximum. b)Transverse, bending and rocking acceleration: sufficiently sma
32、ll to prevent excessive effects on the calibration results. At large amplitudes, preferably in the low-frequency range from 1 Hz to 10 Hz, transverse motion of less than 1 % of the motion in the intended direction may be required; above 10 Hz to 1 kHz, a maximum of 10 % of the axial motion is permit
33、ted; above 1 kHz, a maximum of 20 % of the axial motion is tolerated. c)Hum and noise: 70 dB minimum below full output. d)Acceleration amplitude stability: better than ? 0,05 % of reading over the measurement period. The attachment surface shall introduce minimal base strain to the accelerometer (se
34、e 3.15). 3.4Seismic block(s) for vibrator and laser interferometer The vibrator and the interferometer shall be mounted on the same heavy block or on two different heavy blocks so as to prevent relative motion due to ground motion, or to prevent the reaction of the vibrators support structure from h
35、aving excessive effects on the calibration results. -,-,- ISO 16063-11:1999(E) ISO 1999 All rights reserved3 When a common seismic block is used, it should have a mass at least 2 000 times the moving mass. This causes less than 0,05 % re-active vibration of accelerometer and interferometer. If the m
36、ass of the seismic block is smaller, its motion generated by the vibrator shall be taken into account. To suppress disturbing effects of ground motion, the seismic block(s) used in the frequency range from 10 Hz to 10 kHz should be suspended on damped springs designed to reduce the uncertainty compo
37、nent due to these effects to less than 0,1 %. 3.5Laser A laser of the red helium-neon type shall be used. Under laboratory conditions (i.e. at an atmospheric pressure of 100 kPa, temperature of 23 C and relative humidity of 50 %), the wavelength is 0,632 81 ?m, which is the value used in this part o
38、f ISO 16063. If the laser has manual or automatic atmospheric compensation, this shall be set to zero or switched off. Alternatively, a single-frequency laser may be used with another stable wavelength of known value. 3.6Interferometer An interferometer of the Michelson type shall be used, with a li
39、ght detector for sensing the interferometer signal bands and having a frequency response covering the necessary bandwidth. The maximum bandwidth needed can be calculated from the velocity amplitude, vmax, which has to be measured using fv maxmax ,? ? 316106m 1 For Method 1 (see Figure 1) and Method
40、2 (see Figure 2), a common Michelson interferometer with a single light detector is sufficient. For Method 3 (see Figure 3), a modified Michelson interferometer, with quadrature signal outputs, with two light detectors for sensing the interferometer signal beams, shall be used. The modified Michelso
41、n interferometer may be constructed according to Figure 4. A quarter wavelength retarder converts the incident, linearly polarized light into two measuring beams with perpendicular polarization states and a phase shift of 90. After interfering with the linearly polarized reference beam, the two comp
42、onents with perpendicular polarization shall be separated in space using appropriate optics (e.g. a Wollaston prism or a polarizing beamsplitter), and detected by two photodiodes. The two outputs of the modified Michelson interferometer shall have offsets of less than?5 % in relation to the amplitud
43、e, relative amplitude deviations of less than?5 % and deviations of less than?5 from the nominal angle of 90. To keep these tolerances, appropriate means shall be provided for adjusting the offset, the signal level and the angle between the two interferometer signals. At large displacements, it may
44、be difficult to maintain the above-stated tolerances for the deviations of the two outputs of the modified Michelson interferometer. To comply with the uncertainty of measurement of clause 2, the above tolerances shall be kept at least for small displacement amplitudes up to 2?m. Greater tolerances
45、are permitted for higher amplitudes. EXAMPLEFor a displacement amplitude of 2,5 mm (i.e. acceleration amplitude of 0,1 m/s2at a frequency of 1 Hz), the tolerances may be extended to ? 10 % for the offsets and for the relative amplitude deviations, and to ? 20 for the deviation from the nominal angle
46、 of 90 (see also note 1 of 9.2). NOTEThe (modified) Michelson interferometer for Method 1, 2 or 3 may be replaced by another suitable two-beam interferometer, e.g. a (modified) Mach-Zehnder interferometer. ISO 16063-11:1999(E) 4 ISO 1999 All rights reserved 3.7Counting instrumentation (for Method 1)
47、 Counting instrumentation (for Method 1) having the following characteristics shall be used. a)Frequency range: 1 Hz to the maximum needed frequency. (Typically 20 MHz is used.) b)Maximum uncertainty: 0,01 % of reading. The counter may be replaced by a ratio counter having the same uncertainty. 3.8T
48、unable bandpass filter or spectrum analyser (for Method 2) A tunable bandpass filter or spectrum analyser (for Method 2) having the following characteristics shall be used. a)Frequency range: 800 Hz to 10 kHz. b)Bandwidth: ? 12 % of centre frequency. c)Filter slopes: greater than 24 dB per octave. d
49、)Signal-to-noise ratio: greater than 70 dB below maximum signal. e)Dynamic range: greater than 60 dB. 3.9Instrumentation for zero detection (for Method 2) Instrumentation for zero detection (for Method 2, not needed with spectrum analyser),with a frequency range from 800 Hz to 10 kHz shall be used. The range shall be sufficient for the detection of output noise from th