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1、J I S B*9926 91 4933608 0087966 8 _ UDC 681.123:628.511 .I JAPANESE INDUSTRIAL STANDARD Clean room - Test methods for dust generation from moving mechanisms JIS B 9926-1991 Translated and Published by Japanese Standards Association Printed in Japan J I S B*992b 91 M 4933b08 0087967 T = In the event
2、of any doubt arising, the original Standard in Japanese is to be final authority. -,-,- J I S B * Z b 71 I 4733608 0087b8 1 M Reference Standards : JIS B 9908-Air Filter Units for Ventilation JIS B 9922-Clean ,Work Station UD C 6 1.12 3 : 62 8.5 1 1.1 JAPANESE INDUSTRIAL STANDARD J I S Clean room -
3、Test methods for B 9926-1991 dust generation from moving mechanisms 1. Scope This Japanese Industrial Standard specifies the methods of measuring the size and number of particulates generated during the operation of moving mechanisms of machines and instruments (l) used in clean rooms and in other c
4、lean environments. Note ( l) Production machines, measuring instruments, robots transportation machines, etc. Remarks 1. Moving mechanisms (hereafter referred to as the flspecimensfl) mean those mechanisms which perform horizontal reciprocal motions, vertical reciprocal motions (up and down motions)
5、, rotational motions, and swinging motions, including combinations of these motions. . 2. The following standards are cited in this Standard: JIS B 9920 Measuring Methods for Airborne Particles in Clean Room and Evaluating Methods for Air Cleanliness of Clean Room JIS B 9921 Light Scattering Automat
6、ic Particle Counter JIS K 0554 Testing Methods for Concentration of Fine Particles in Highly Purified Water JIS K 8839 2-Propanol JIS Z 8122 Glossary of Terms for Contamination Control JIS Z 8762 Measurement of Fluid Flow by Means of Orifice Plates, Nozzles and Venturi Tubes J I S B*992b 91 W 493360
7、8 0087969 3 W 2 B 9926-1991 2, Definition For the purpose of this Standard, in addition to those specified in JIS B 9920, JIS B 9921, and JIS 2.8122 the following principal definitions shall apply : (1) wiper An implement used for cleaning objects by wiping them. It is made of cloth, polyurethane, e
8、tc, satisfying such conditions as low dust-productivity , adsorptivity , and electricity suppressing capability. % 3. Measuring apparatus The measuring apparatus shall be as follows: 3.1 Constitution unit y air filter unit, specimen installation unit, flow contraction and mixing unit, and measuring
9、unit, The measuring apparatus shall be composed of a blowing 3.2 Classification The measuring apparatus shall be classified by the directions of conveyed air into the horizontal type and vertical type (refer to Fig. 1 (a) and Fig. 1 (b). 3.3 Construction The construction of the measuring apparatus s
10、hall be as follows: (i) Construction in general The inner surfaces of the measuring apparatus shall be smooth, resistant to adhesion of particulates y and resistant to rusting, Further, the apparatus shall have a construction which does not allow inflow or outflow of particulates likely to influence
11、 the measured values of particulates, (2) Air filter unit The air filter unit is a part which supplies clean air to the specimen installation unit, and the filters installed therein shall consist of ULPA filters, (3) Specimen installation unit The size of the specimen installation unit shall be such
12、 that specimen can be operated in the same condition as in its actual use. Further, this unit shall be equipped with an airtight door for installing the specimen in the apparatus, (4) Contraction and mixing unit The contraction and mixing unit shall be so constructed that the dust generated from the
13、 specimen thoroughly mixes with the flowing air and the dust concentration of the flowing air in the measuring unit becomes as uniform as possible. -,-,- J I S B*92b 91 m 4933608 0087970 T m _ _ - _ _ _ _ - _ 3 B 9926-1991 (5) Measuring unit This unit provides the place for measuring the quantity of
14、 generated dust and the speed of air flow, and shall have an adequate size to allow the measurement of 4.6 to be made properly. Further, the unit shall be constructed with care to avoid the adhesion of dust on the inner surfaces of the apparatus. The material and the length of the sampling tube and
15、its suction end shall be as specified in 5.4 (preparation for measurement) of JIS B 9920. Fig. 1 (a). Example of constitution of horizontal type measuring apparatus Blowing un t ) Opening with airtight door Air filter unit Contraction and mixing unit Specimen installation Measuring unit unit J I S B
16、*992b 93 m 4933608 0087973 3 m 4 B 9926-1991 Fig. 1 (b). Example of constitution of vertical type measuring apparatus Exhaust - Blowing unit Air filter unit ( 3 J Specimen installation unit ) Opening with airtight door Contraction and mixing unit Measuring unit 4. Measuring method 4.1 Measuring appa
17、ratus used Either the horizontal type or the vertical type measuring apparatus shall be used according to the actual service condition of the specimen (in a horizontal air stream or in a vertical air stream), However, where there is no influence of the air flow direction on the measured value, eithe
18、r type of measuring apparatus may be used. 4.2 Place of installing measuring apparatus The measuring apparatus shall be installed in a place which is clean enough to cause no influence on the test results. I a -,-,- J I S B*992b 91 m 4933608 0087972 3 = 5 B 9926-1991 4.3 Verification of measuring ap
19、paratus The uniformity of dust concentration at the dust generation measuring unit shall be verified by generating DOP aerosol or equivalent standard particles, which can be generated steadily. 4.4 Cleaning of specimen The outer surfaces of the specimen shall be cleaned, before testing, by using a l
20、ow dust-productive wiper and the following highly purified water or reagents. (1) Highly purified water The highly purified water specified in JIS K 0554, or a purified water equivalent or superior thereto in - quality. (2) Reagents The following reagents shall be used after filtering them with a me
21、mbrane filter. (a) Distilled water (b) 2-Propanol (isopropyl alcohol) as specified in JIS K 8839 or one equivalent or superior thereto in quality, (3) Wiper A low dust-productive wiper. 4.5 Installation of specimen The specimen shall be installed as follows: (1) The specimen shall be installed firml
22、y, in a condition close to that in the practical use, in the specimen installation unit of Fig. 1 (a) or (b). (2) The specimen shall be so installed as to allow the generated particulates to flow downstream easily. 4.6 Setting and measurement of air flow speed The setting and measurement of air flow
23、 speed shall be made as follows: (1) Setting of air flow speed It is desirable to set the air flow speed in the specimen installation unit to the air flow speed in the practical use of the specimen, but where measured values do not depend on the air flow rate or where the number of generated particl
24、es is small, the air flow speed may be reduced from that in the practical use, However, in that case, the speed shall not be reduced to such an extent that the measured values are influenced by the error caused by the settling of particulates on the inner surfaces of the apparatus. The flow rate of
25、air passing through the measuring apparatus during the dust generation measurement shall be measured by means of an orifice flowmeter, in accordance with the measuring method of JIS Z 8762, or with a measuring method equivalent thereto in reproducibility, (2) Measurement -,-,- J I S B*9926 91 m 4933
26、608 0087973 5 m 6 B 9926-1991 4.7 Measurement of background After completion of cleaning of the specimen, the required quantity of air shall be passed through the apparatus. measuring position and the particle concentration shall be measured by the method shown in JIS B 9920 (where it is required to
27、 measure particle size to 0.1 um the method shown in the Annex of the same standard), and the value obtained when the measured value has become constant shall be taken as the particle concentration cb (pieces/m3) of the background. The particle concentration shall be indicated for each particle size
28、 range shown in Table 1. Air sampling shall be made at the particle Concentration Table 1. Ranges of particle size (2) of background Particle size range (um) 0.3 and over up to but .excluding 0.5 0.5 and over up to but excluding 1.0 1.0 and over up to but excluding 5.0 5.0 and over Fibrous particles
29、 Note (2) Where a light scattering automatic particle counter capable of measuring down to 0.1 um is used, a range from 0.1 um up to but excluding 0.3 um shall be added. Where the particle concentration is . . measured by a microscopic method, the number of pieces of fibrous particles shall also be
30、recorded. 4.8 Measurement of particle concentration during movement The particle concentration during the movement of the specimen shall be measured as follows : (i) Movement of specimen After completion of background measurement, operate the specimen. Where various movements are combined, let the s
31、pecimen perform a series of movements following the practical moving sequence. (2) Measurement of particle concentration Where the movement of the specimen is performed constantly, determine the average particle concentration by making continuous sampling until an effective result of measurement is
32、obtained. Where the movement of the specimen consists of a combination of a number of movements, carry out continuous sampling for a period of one cycle from the start to the end of the combined movements, and determine the average particle concentration by measuring the cumulative number of particl
33、es in the same method as given in 4.7. If the particle concentration is low, determine the average particle concentration by carrying out continuous sampling over several cycles. J I S B*9926 91 = Y933608 008797Y 7 W 7 B 9926-1991 4.9 Calculation of quantity of generated particles The quantity of ge
34、nerated particles shall be calculated for each particle size range from the following formula: P= (c-cb) Q where, P : quantity of generated (pieceslmin) particles c : particle concentration (pieceslm3) during movement cb : background particle (pieceslm3) concentration Q : air flow rate (m3 / min) Th
35、e total number of particles generated by one cycle of movement, if required, shall be calculated by multiplying the value of P by the time of one cycle (min), 4.10 Indication of results of measurement The results of measurement shall be indicated for each particle size range as shown in Table 2. Tab
36、le 2. Quantity of generated particles Particle size range (Fim) (2) 0.3 and over up to but excluding 0.5 0.5 and over up to but excluding 1.0 1.0 and over up to but excluding 5.0 5 . 0 and over Fibrous particles Background particle concentration (pieces/m3) (IC, ) Average particle concentration duri
37、ng movement (pieceslm3) (CI Note (2) Refer to Note (2) of Table 1. Average quantity of generated particles (pieceslmin) (P) J I S B*9926 91 4933b08 0087975 9 m I 8. B 9926-1991 5. Report The following items shall be written in the report: (i) Summary of specimen (shape and movement) (2) Summary of m
38、ovement during measurement (3) (4) Results of measurement Measuring method (measuring apparatus and measuring method) (a) (b) Air flow rate (c) Background particle concentration (d) Quantity of particle generation Date of measurement, place, and person in charge 7 a -,-,- e c 0 e e B 9926-1991 Editi
39、on 1 Japanese Text Established by Minister of International Trade and Industry Date of Establishment : 1991-03-01 Date of Public Notice in Official Gazette: 1991-03-20 Investigated by : Japanese Industrial Standards Committee Divisional Council on General Machinery This English translation is published by: Japanese Standards Association 1-24 , Akasaka 4, Minato-ku , Tokyo 107 Japan O JSA, 1991 Printed i n Tokyo by Hohbunsha Co., Ltd. -,-,-