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1、.,CMOS工艺器件结构,.,CMOS工艺中常用的元器件,MOSFET (hv or lv ) PMOS NMOS NMOS_dnw NMOS_native RESISTOR CAPACITANCE DIODE BIPOLAR INDUCTOR,.,一、MOSFET,Nmos 版图,Nmos 剖面图,NMOSFET 版图和结构,.,一、MOSFET,Nmos _na版图,Nmos_na 剖面图,NMOS_NA 版图和结构,.,一、MOSFET,Nmos_dnw 版图,Nmos_dnw 剖面图,NMOS_dnw 版图和结构,.,一、MOSFET,Pmos 版图,Pmos 剖面图,PMOSFET
2、版图和结构,.,二、RESISTOR,Poly resistor 版图,Poly resistor 剖面图,Poly resistor 版图和结构,.,二、RESISTOR,nwell resistor 版图,nwell resistor 剖面图,nwell resistor 版图和结构,.,二、RESISTOR,普通poly resistor 版图,扩散电阻版图,Others resistor版图和结构,.,三、CAPACITANCE,MIM cap 版图,MIM版图和结构,.,三、CAPACITANCE,MOM cap 版图,MOM版图和结构,.,三、CAPACITANCE,VAR cap 版图,VARACTOR版图和结构,VAR cap 剖面图,.,三、CAPACITANCE,MOS管做电容示意图,MOS CAP版图和结构,.,四、DIODE,DIODE 版图,PSD/NWELL版图和结构,DIODE 剖面图,.,四、DIODE,DIODE 版图,PSD/NWELL版图和结构,DIODE 剖面图,.,五、BIPOLAR(BJT),横向BJT(pnp)版图和结构,DIODE 版图及对应剖面图,.,六、INDUCTOR,INDUCTOR版图和结构,INDUCTOR版图,目前基本能用到的都是metal做的inductor,务必选用PDK中cell,切勿修改。,.,谢谢!,